Thickness Plasma Enhanced Atomic Layer Deposition Publications

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NumberTitle
1Flexible Al2O3/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process
2Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics
3Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
4Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
5Interfacial Self-Cleaning during PEALD HfO2 Process on GaAs Using TDMAH/O2 with Different (NH4)2S Cleaning Time
6Optimization of the Surface Structure on Black Silicon for Surface Passivation
7Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
8Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping
9Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
10Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
11Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
12Texture of atomic layer deposited ruthenium
13Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
14Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition
15Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
16Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
17ZrO2 Gate Dielectric Deposited by Plasma-Enhanced Atomic Layer Deposition Method
18ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors
19Electrically Excited Plasmonic Nanoruler for Biomolecule Detection
20Conformal Fe, Co and Ni Films from Oxides and Nitrides Grown by Atomic Layer Deposition
21Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
22Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films
23Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
24Atomic layer epitaxy of Si using atomic H
25Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallization
26Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
27Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
28Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
29Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
30Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
31Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant
32Controlling the composition of Ti1-xAlxN thin films by modifying the number of TiN and AlN subcycles in atomic layer deposition
33Effects of N2 RPN on the Structural and Electrical Characteristics of Remote Plasma Atomic Layer-Deposited HfO2 Films
34Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films
35Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
36Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes
37Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
38Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries
39Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition
40Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
41Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma
42Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing
43Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
44Formation of Tantalum Carbide and Nitride Phases in Atomic Layer Deposition Using Hydrogen Plasma and tert-Butylimidotris( diethylamido)-tantalum (TBTDET), and its Effect on Material Properties
45Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity
46Impact of AlN Interfacial Dipole on Effective Work Function of Ni and Band Alignment of Ni/HfO2/In0.53Ga0.47As Gate-Stack
47Growth of tantalum nitride film as a Cu diffusion barrier by plasma-enhanced atomic layer deposition from bis((2-(dimethylamino)ethyl)(methyl)amido)methyl(tert-butylimido)tantalum complex
48Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
49Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques
50A PEALD Tunnel Dielectric for Three-Dimensional Non-Volatile Charge-Trapping Technology
51Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
52Perspectives on future directions in III-N semiconductor research
53Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
54High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
55Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth
56Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
57A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
58Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
59Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition
60Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
61Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
62Interfacial, Electrical, and Band Alignment Characteristics of HfO2/Ge Stacks with In Situ-Formed SiO2 Interlayer by Plasma-Enhanced Atomic Layer Deposition
63Passivation of InGaAs interface states by thin AlN interface layers for metal-insulator-semiconductor applications
64Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
65Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
66Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
67Characteristics of WNxCy films deposited using remote plasma atomic layer deposition with (MeCp)W(CO)2(NO) for Cu diffusion barrier
68Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes
69Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
70Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
71Graphene-based MMIC process development and RF passives design
72Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors
73Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
74A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
75Impact of interface materials on side permeation in indirect encapsulation of organic electronics
76Composite materials and nanoporous thin layers made by atomic layer deposition
77Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
78Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
79Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation
80Patterned deposition by plasma enhanced spatial atomic layer deposition
81PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases
82Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
83Integration of Atomic Layer Deposited Al2O3 Dielectrics with Graphene
84Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
85Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization
86Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
87Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
88Plasma-enhanced atomic layer deposition of vanadium nitride
89Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD
90TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
91Atomic layer deposited silicon dioxide films on nanomechanical silicon nitride resonators
92Advances in the fabrication of graphene transistors on flexible substrates
93Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
94Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
95Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
96Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
97Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric
98Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications
99Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
100Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
101Investigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization
102Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
103Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes
104Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor
105Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition
106Electrical and structural properties of conductive nitride films grown by plasma enhanced atomic layer deposition with significant ion bombardment effect
107Influence of plasma-based in-situ surface cleaning procedures on HfO2/In0.53Ga0.47As gate stack properties
108The effect of atomic layer deposition temperature on switching properties of HfOx resistive RAM devices
109Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
110Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
111GeSbTe deposition for the PRAM application
112Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
113Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
114Challenges in spacer process development for leading-edge high-k metal gate technology
115Interface effect on dielectric constant of HfO2/Al2O3 nanolaminate films deposited by plasma-enhanced atomic layer deposition
116Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si
117Control of ion energy during plasma enhanced atomic layer deposition: A new strategy for the modulation of TiN growth delay on SiO2
118Room-Temperature Atomic Layer Deposition of HfO2 By Using Remote Plasma Source
119Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
120Tin Oxynitride Anodes by Atomic Layer Deposition for Solid-State Batteries
121Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
122Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
123Effects of N2 remote plasma nitridation on the structural and electrical characteristics of the HfO2 gate dielectrics grown using remote plasma atomic layer deposition methods
124Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
125An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD
126The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
127Chemical Reaction Mechanism in the Atomic Layer Deposition of TaCxNy Films Using tert-Butylimidotris(diethylamido)tantalum
128Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
129Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
130Infrared Study of Room Temperature Atomic Layer Deposition of SnO2 Using Sn(CH3)4 and Plasma Excited Humidified Argon
131Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
132Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition
133Role of the (Ta/Nb)Ox/Al2O3 interface on the flatband voltage shift for Al2O3/(Ta/Nb)Ox/Al2O3 multilayer charge trap capacitors
134Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
135In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
136Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide
137Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
138Effect of hydrogen plasma treatment on the passivation performance of TiOx on crystalline silicon prepared by atomic layer deposition
139Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
140Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System
141Remote Plasma Atomic Layer Deposition of HfO2 Thin Films Using the Alkoxide Precursor Hf(mp)4
142Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization
143Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
144Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
145Analysis of nitrogen species in titanium oxynitride ALD films
146Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
147Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
148Growth of aluminum nitride thin films prepared by plasma-enhanced atomic layer deposition
149Role of low-energy ion irradiation in the formation of an aluminum germanate layer on a germanium substrate by radical-enhanced atomic layer deposition
150Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
151Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells
152Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
153Microwave properties of superconducting atomic-layer deposited TiN films
154Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems
155Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy
156Nanometer-Thick Conformal Pore Sealing of Self-Assembled Mesoporous Silica by Plasma-Assisted Atomic Layer Deposition
157Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
158Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
159The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
160The important role of water in growth of monolayer transition metal dichalcogenides
161Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
162Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
163Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
164The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling Atomic Layer Deposition of InN Films
165Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process
166Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition
167RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor
168Self-Limiting Growth of GaN at Low Temperatures
169Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
170Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
171Atomic layer deposition of GaN at low temperatures
172Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
173Structural and optical characterization of low-temperature ALD crystalline AlN
174Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al2O3
175Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
176WNx Film Prepared by Atomic Layer Deposition using F-Free BTBMW and NH3 Plasma Radical for ULSI Applications
177Remote Plasma ALD of Platinum and Platinum Oxide Films
178Topographical selective deposition: A comparison between plasma-enhanced atomic layer deposition/sputtering and plasma-enhanced atomic layer deposition/quasi-atomic layer etching approaches
179A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition
180Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD
181Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
182Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics
183Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
184Characteristics of Thin Hf-Silicate Gate Dielectrics after Remote N2 and N2O Plasma Post-Treatments
185Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers
186The Applications of Ultra-Thin Nanofilm for Aerospace Advanced Manufacturing Technology
187Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
188Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
189The Cut-Off Phenomenon Effect on ZrO2 Growth Using Remote Plasma-Enhanced Atomic Layer Deposition
190Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
191Characteristics of the HfO2 Thin Films Grown by Remote Plasma Atomic Layer Deposition Method on the Plasma Oxidized Si Substrate
192A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition
193Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
194Atomic Layer Deposition of Niobium Nitride from Different Precursors
195Influence of plasma parameters on the properties of ultrathin Al2O3 films prepared by plasma enhanced atomic layer deposition below 100C for moisture barrier applications
196Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation
197Plasma-Assisted Atomic Layer Deposition of Conductive Hafnium Nitride Using Tetrakis(ethylmethylamino)hafnium for CMOS Gate Electrode Applications
198Comparative study of ALD SiO2 thin films for optical applications
199Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
200Terahertz Quantum Plasmonics of Nanoslot Antennas in Nonlinear Regime
201PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
202The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
203Correlation between SiO2 growth rate and difference in electronegativity of metal-oxide underlayers for plasma enhanced atomic layer deposition using tris(dimethylamino)silane precursor
204Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma
205Growth of Bi2O3 Films by Thermal- and Plasma-Enhanced Atomic Layer Deposition Monitored with Real-Time Spectroscopic Ellipsometry for Photocatalytic Water Splitting
206A route to low temperature growth of single crystal GaN on sapphire
207Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
208Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases
209Study on the characteristics of aluminum thin films prepared by atomic layer deposition
210Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition
211Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
212Hysteresis behaviour of top-down fabricated ZnO nanowire transistors
213Phase Formation in the Tantalum Carbonitride Film Deposited with Atomic Layer Deposition Using Ammonia
214The Effects of Annealing Ambient on the Characteristics of La2O3 Films Deposited by RPALD
215Ru thin film grown on TaN by plasma enhanced atomic layer deposition
216Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
217Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
218Low Voltage Switching Characteristics of 60 nm Thick SrBi2Ta2O9 Thin Films Deposited by Plasma-Enhanced ALD
219Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
220Improvement of Capacitance Equivalent Thickness, Leakage Current, and Interfacial State Density Based on Crystallized High-K Dielectrics/Nitrided Buffer Layer Gate Stacks
221Influence of the Deposition Temperature on the c-Si Surface Passivation by Al2O3 Films Synthesized by ALD and PECVD
222Atomic Layer Deposition of SiN for spacer applications in high-end logic devices
223Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
224Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
225Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
226Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
227Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition
228Hydrogen plasma-enhanced atomic layer deposition of copper thin films
229In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition
230Evaluation of Thermal Versus Plasma-Assisted ALD Al2O3 as Passivation for InAlN/AlN/GaN HEMTs
231Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
232Plasma Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and NH3 Plasma
233Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes
234Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
235Plasma-Enhanced Atomic Layer Deposition of TaN Thin Films Using Tantalum-Pentafluoride and N2/H2/Ar Plasma
236Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
237Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
238Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing
239Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO2 Thin Films via Atomic Layer Deposition
240Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
241Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
242Plasma enhanced atomic layer deposition of aluminum sulfide thin films
243Characteristics of Al2O3 Thin Films Deposited Using Dimethylaluminum Isopropoxide and Trimethylaluminum Precursors by the Plasma-Enhanced Atomic-Layer Deposition Method
244Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma
245Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS2 MOSFET with an AlN Interfacial Layer
246Large area, patterned growth of 2D MoS2 and lateral MoS2-WS2 heterostructures for nano- and opto-electronic applications
247In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition
248Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
249Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
250The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
251Advanced thin gas barriers film incorporating alternating structure of PEALD-based Al2O3/organic-inorganic nanohybrid layers
252Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition
253High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
254Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
255Ultraviolet photodetector based on MgxZn1-xO films using plasma-enhanced atomic layer deposition
256Plasma-enhanced ALD system for SRF cavity
257Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
258Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
259Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
260Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
261Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO3 Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
262Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
263Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
264Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
265Thermodynamic properties and interfacial layer characteristics of HfO2 thin films deposited by plasma-enhanced atomic layer deposition
266Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3
267Thermal and plasma enhanced atomic layer deposition of ultrathin TiO2 on silicon from amide and alkoxide precursors: growth chemistry and photoelectrochemical performance
268TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
269Characteristics of HfO2 thin films grown by plasma atomic layer deposition
270In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
271In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
272Interface engineering of ALD HfO2-based RRAM with Ar plasma treatment for reliable and uniform switching behaviors
273Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
274Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
275Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
276Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C
277Comparison of gate dielectric plasma damage from plasma-enhanced atomic layer deposited and magnetron sputtered TiN metal gates
278Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier
279Ta-rich atomic layer deposition TaN adhesion layer for Cu interconnects by means of plasma-enhanced atomic layer deposition
280Growth, physical and electrical characterization of nickel oxide thin films prepared by plasma-enhanced atomic layer deposition using nickelocene and oxygen precursors
281Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes
282Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)
283Atomic Layer Deposition of V1-xMoxO2 Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation
284Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition
285Characteristics of Plasma-Enhanced Atomic Layer Deposited RuSiN as a Diffusion Barrier against Cu
286Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
287Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
288Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al2O3 with POx Interlayer
289Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
290Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry
291Development of Manufacturable Solutions for the Direct Plating of Copper on Robust ALD-Grown Barriers
292Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
293Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
294Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
295Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
296The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
297Highly Conductive HfNx Films Prepared by Plasma-Assisted Atomic Layer Deposition
298Atomic layer epitaxy for quantum well nitride-based devices
299Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
300Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
301Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films
302Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
303Room temperature atomic layer deposition of TiO2 on gold nanoparticles
304Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3 gate dielectric thin films
305Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
306Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
307Plasma Enhanced Atomic Layer Deposition of Ru-Ta composite film as a Seed Layer for CVD Cu filling
308Development of Space Divided PE-ALD System and Process Design for Gap-Fill Process in Advanced Memory Devices
309Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
310Plasma enhanced atomic layer deposition of Fe2O3 thin films
311Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
312Plasma Enhanced Atomic Layer Deposition of SiN:H Using N2 and Silane
313Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
314Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
315Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
316A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
317Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
318Work function tuning of plasma-enhanced atomic layer deposited WCxNy electrodes for metal/oxide/semiconductor devices
319Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
320Long period gratings coated with hafnium oxide by plasma-enhanced atomic layer deposition for refractive index measurements
321Influence of the charge trap density distribution in a gate insulator on the positive-bias stress instability of amorphous indium-gallium-zinc oxide thin-film transistors
322Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
323Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
324Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries
325Symmetrical Al2O3-based passivation layers for p- and n-type silicon
326Initial reaction of hafnium oxide deposited by remote plasma atomic layer deposition method
327Plasma-enhanced atomic layer deposition of nickel thin film using bis(1,4-diisopropyl-1,4-diazabutadiene)nickel
328Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition
329Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
330Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
331Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition
332Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
333Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition
334Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
335Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
336Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
337High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates
338Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors
339MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
340Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition
341Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
342Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
343Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films
344Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
345In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films
346Characteristics of Plasma-Enhanced Atomic-Layer Deposited (PEALD) SnO2 Thin Films
347Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
348Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure
349Plasma enhanced atomic layer deposition of silicon nitride using neopentasilane
350Characteristics of Metal-Oxide-Semiconductor Field-Effect Transistors with HfO2/SiO2/Si and HfO2/SiOxNy/Si Stack Structures Formed by Remote Plasma Technique
351Plasma-enhanced atomic layer deposition of superconducting niobium nitride
352Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
353In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
354The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
355Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
356Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
357The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
358Electrochemical Performance of Lithium-Nickel Oxide Thin Films Obtained with Use of Atomic Layer Deposition
359Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN
360Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
361Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
362Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
363Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
364Atomic layer epitaxy of germanium
365Field-enhanced direct tunneling in ultrathin atomic-layer-deposition-grown Au-Al2O3-Cr metal-insulator-metal structures
366Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N2 plasma for gate spacer
367Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition
368Characteristics of an Al2O3 Thin Film Deposited by a Plasma Enhanced Atomic Layer Deposition Method Using N2O Plasma
369Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
370Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
371Layer-by-layer epitaxial growth of GaN at low temperatures
372Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
373The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
374Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
375Room-Temperature Atomic Layer Deposition of Platinum
376Epitaxial GaN using Ga(NMe2)3 and NH3 plasma by atomic layer deposition
377Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3
378Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
379Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors
380Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
381Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
382Highly stable all-inorganic CsPbBr3 nanocrystals film encapsulated with alumina by plasma-enhanced atomic layer deposition
383Atmospheric pressure plasma enhanced spatial ALD of silver
384Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
385Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
386Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
387High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
388Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
389Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon
390Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC
391Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
392Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
393Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
394Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
395Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
396TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD
397DC characteristics of ALD-grown Al2O3/AlGaN/GaN MIS-HEMTs and HEMTs at 600°C in air
398Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
399Effects of Hydrogen Plasma Treatments on the Atomic Layer Deposition of Copper
400Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
401Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
402Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN
403Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material
404Plasma Enhanced Atomic Layer Deposition on Powders
405Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
406Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
407Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
408Influence of Surface Temperature on the Mechanism of Atomic Layer Deposition of Aluminum Oxide Using an Oxygen Plasma and Ozone
409Spectroscopy and control of near-surface defects in conductive thin film ZnO
410Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources
411Dielectric barrier characteristics of Si-rich silicon nitride films deposited by plasma enhanced atomic layer deposition
412Atomic layer controlled deposition of silicon nitride with self-limiting mechanism
413Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
414Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices
415Damage evaluation in graphene underlying atomic layer deposition dielectrics
416Characteristics of Cobalt Films Deposited by Using a Remote Plasma ALD Method with a CpCo(CO)2 Precursor
417Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
418Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
419Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films
420Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
421Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
422Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor
423Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
424Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating
425In situ x-ray photoelectron emission analysis of the thermal stability of atomic layer deposited WOx as hole-selective contacts for Si solar cells
426Plasma-enhanced atomic layer deposition of SiO2 for channel isolation of colloidal quantum dots phototransistors
427Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
428Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD
429Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
430Plasma enhanced atomic layer deposition of SiNx:H and SiO2
431Enhancing the Wettability of High Aspect-Ratio Through-Silicon Vias Lined With LPCVD Silicon Nitride or PE-ALD Titanium Nitride for Void-Free Bottom-Up Copper Electroplating
432ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic Layer Deposition Using Cyclopentadienyltris(dimetylamino)zirconium
433Effects of Remote Plasma Pre-oxidation of Si Substrates on the Characteristics of ALD-Deposited HfO2 Gate Dielectrics
434Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH3 Plasma
435PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
436Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
437Effect of cycling on ultra-thin HfZrO4, ferroelectric synaptic weights
438Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
439Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
440Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma
441In-system photoelectron spectroscopy study of tin oxide layers produced from tetrakis(dimethylamino)tin by plasma enhanced atomic layer deposition
4423D structure evolution using metastable atomic layer deposition based on planar silver templates
443Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition
444Preparation of Ru thin film layer on Si and TaN/Si as diffusion barrier by plasma enhanced atomic layer deposition
445Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3
446Plasma-enhanced atomic layer deposition of zinc phosphate
447Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
448Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
449Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
450Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
451Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2 + 95% N2) plasma
452Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
453Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition
454Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma
455Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
456In Situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition
457Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride
458Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
459Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer
460Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas
461Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
462A comparative study on electrical characteristics of crystalline AlN thin films deposited by ICP and HCPA-sourced atomic layer deposition
463Ga2O3 MOSFETs Using Spin-On-Glass Source/Drain Doping Technology
464Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
465Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
466Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition
467Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration
468Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
469Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
470Efficiency enhancement of InGaN/GaN blue light-emitting diodes with top surface deposition of AlN/Al2O3
471Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
472HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition
473Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
474Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
475Atomic layer deposition growth of a novel mixed-phase barrier for seedless copper electroplating applications
476Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
477Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
478Innovative remote plasma source for atomic layer deposition for GaN devices
479Atomic Layer Deposition of HfO2 Thin Films on Ultrathin SiO2 Formed by Remote Plasma Oxidation
480Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
481Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
482Atomic layer deposition of high purity Ga2O3 films using liquid pentamethylcyclopentadienyl gallium and combinations of H2O and O2 plasma
483Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy
484Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
485ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition
486Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
487Copper-ALD Seed Layer as an Enabler for Device Scaling
488A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
489Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
490Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
491Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
492Strongly Disordered TiN and NbTiN s-Wave Superconductors Probed by Microwave Electrodynamics
493Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
494Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3
495Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
496Atomic layer deposition of WNx thin films using a F-free tungsten metal-organic precursor and NH3 plasma as a Cu-diffusion barrier
497Properties and Mechanism of PEALD-In2O3 Thin Films Prepared by Different Precursor Reaction Energy
498Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
499Plasma-enhanced atomic layer deposition of tungsten nitride
500XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films
501Self-limiting diamond growth from alternating CFx and H fluxes
502Plasma-Assisted Atomic Layer Deposition of Palladium
503Advanced thin conformal Al2O3 films for high aspect ratio mercury cadmium telluride sensors
504Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
505GaN Nanowire MOSFET With Near-Ideal Subthreshold Slope
506Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices
507Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
508Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
509Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
510Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications
511Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
512Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films
513Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
514Interfaces Formed by ALD Metal Oxide Growth on Metal Layers
515Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
516Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions
517Gallium nitride thin films by microwave plasma-assisted ALD
518The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
519Correlation between ferroelectricity and ferroelectric orthorhombic phase of HfxZr1-xO2 thin films using synchrotron x-ray analysis
520Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
521Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
522Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
523Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
524Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
525Synthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity
526Growth of rutile-TiO2 thin films via Sn doping and insertion of ultra-thin SnO2 interlayer by atomic layer deposition
527Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET
528Large-Scale Deposition and Growth Mechanism of Silver Nanoparticles by Plasma-Enhanced Atomic Layer Deposition
529ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
530Plasma-Enhanced Atomic Layer Deposition of Tantalum Nitrides Using Hydrogen Radicals as a Reducing Agent
531Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM
532Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
533Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering
534Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
535Plasma-Enhanced Atomic Layer Deposition of Ni
536Densification of Thin Aluminum Oxide Films by Thermal Treatments
537Low-temperature plasma-enhanced atomic layer deposition of tin oxide electron selective layers for highly efficient planar perovskite solar cells
538Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
539Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
540Characterization of HfOxNy thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas
541Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
542In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
543Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
544Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
545Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
546Nanochemistry, nanostructure, and electrical properties of Ta2O5 film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition
547Gate-tunable high mobility remote-doped InSb/In1-xAlxSb quantum well heterostructures
548Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach
549Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
550Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
551Crystalline AlN Interfacial Layer on GaN Using Plasma-Enhanced Atomic Layer Deposition
552Oxide Charge Engineering of Atomic Layer Deposited AlOxNy/Al2O3 Gate Dielectrics: A Path to Enhancement Mode GaN Devices
553Ultrathin Surface Coating Enables the Stable Sodium Metal Anode
554Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
555Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
556In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
557Ferroelectricity of HfxZr1-xO2 thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition
558Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
559Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
560Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors
561Improved electrical performances of plasma-enhanced atomic layer deposited TaCxNy films by adopting Ar/H2 plasma
562Composition, structure, and electrical characteristics of HfO2 gate dielectrics grown using the remote- and direct-plasma atomic layer deposition methods
563Sub-10-nm ferroelectric Gd-doped HfO2 layers
564Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique
565Area-Selective Atomic Layer Deposition of In2O3:H Using a µ-Plasma Printer for Local Area Activation
566Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
567Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
568Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition
569GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
570XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition
571Formation of Al2O3 Film on Si Substrate by Microwave Generated Remote Plasma Assisted Atomic Layer Deposition Technique
572Remote plasma-enhanced atomic layer deposition of metallic TiN films with low work function and high uniformity
573Low temperature plasma enhanced deposition of GaP films on Si substrate
574Plasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells
575ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors
576Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
577Plasma-enhanced atomic layer deposition of amorphous Ru-Si-N thin film as a diffusion barrier of direct plating of Cu
578Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
579Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
580Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition
581Thin film GaP for solar cell application
582Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors
583Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
584Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
585Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device
586Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
587Antioxidation properties of Ti0.83Al0.17N prepared using plasma-enhanced atomic layer deposition
588Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
589Influence of Working Pressure on the Al2O3 Film Properties in Plasma-Enhanced Atomic Layer Deposition
590Growth characteristics and electrical properties of La2O3 gate oxides grown by thermal and plasma-enhanced atomic layer deposition
591ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications
592Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
593Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3
594Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
595N-doped TiO2 nanotubes coated with a thin TaOxNy layer for photoelectrochemical water splitting: dual bulk and surface modification of photoanodes
596Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
597Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
598Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor
599Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation
600Atomic layer deposited HfO2/HfSixOyNz stacked gate dielectrics for metal-oxide-semiconductor structures
601AlN PEALD with TMA and forming gas: study of plasma reaction mechanisms
602Atomic hydrogen-assisted ALE of germanium
603Chemistry of SiNx thin film deposited by plasma-enhanced atomic layer deposition using di-isopropylaminosilane (DIPAS) and N2 plasma
604Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
605Growth mechanism and diffusion barrier property of plasma-enhanced atomic layer deposition Ti-Si-N thin films
606Plasma-Enhanced Atomic Layer Deposition of SrTa2O6 Thin Films Using Sr[Ta(OC2H5)5(OC2H4OCH3)]2 as Precursor
607Emerging Atomic Layer Deposition (ALD) Processes For Low Thermal Budget Flexible Electronics
608Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
609Plasma-enhanced atomic layer deposition of tantalum nitride thin films using tertiary-amylimido-tris(dimethylamido)tantalum and hydrogen plasma
610High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
611Aluminum Oxide at the Monolayer Limit via Oxidant-Free Plasma-Assisted Atomic Layer Deposition on GaN
612Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing
613Controlling transition metal atomic ordering in two-dimensional Mo1-xWxS2 alloys
614The effects of layering in ferroelectric Si-doped HfO2 thin films
615Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
616GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation
617Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)
618An improvement of HfO2/Ge interface by in situ remote N2 plasma pretreatment for Ge MOS devices
619Plasma-enhanced atomic layer deposition for plasmonic TiN
620Experimental and theoretical determination of the role of ions in atomic layer annealing
621Effect of Nitrogen Incorporation in HfO2 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
622Plasma-Assisted Atomic Layer Deposition of Al2O3 at Room Temperature
623Effect of Oxygen Source on the Various Properties of SnO2 Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
624A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
625Growth of cubic-TaN thin films by plasma-enhanced atomic layer deposition
626Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition
627Plasma-Enhanced Atomic Layer Deposition of Ta-N Thin Films
628Performance and retention characteristics of nanocrystalline Si floating gate memory with an Al2O3 tunnel layer fabricated by plasma-enhanced atomic layer deposition
629Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry
630The Integration of Plasma Enhanced Atomic Layer Deposition (PEALD) of Tantalum- Based Thin Films for Copper Diffusion Barrier Applications
631Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
632Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
633Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications
634Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
635Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
636An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
637Uniformity of HfO2 Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition
638Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
639A Chemical Reaction Path Design for the Atomic Layer Deposition of Tantalum Nitride Thin Films
640Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
641Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers
642Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
643Atomic layer epitaxy of gallium arsenide with the use of atomic hydrogen
644Optical and Electrical Properties of TixSi1-xOy Films
645Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten
646Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
647Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
648Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
649Fast PEALD ZnO Thin-Film Transistor Circuits
650Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide
651Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2
652Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
653AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
654Comparison of AlF3 thin films grown by thermal and plasma enhanced atomic layer deposition
655Growing aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
656Atomic layer deposition of copper thin film and feasibility of deposition on inner walls of waveguides
657Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
658Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection
659Comparisons of alumina barrier films deposited by thermal and plasma atomic layer deposition
660Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
661Growth of aluminum nitride films by plasma-enhanced atomic layer deposition
662Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
663Influence of Al2O3 layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors
664Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen
665Study on deposition of Al2O3 films by plasma-assisted atomic layer with different plasma sources
666Influence of oxidant source on the property of atomic layer deposited Al2O3 on hydrogen-terminated Si substrate
667Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
668Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
669PEALD AlN: controlling growth and film crystallinity
670Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
671Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
672Atomic layer deposition of stoichiometric In2O3 films using liquid ethylcyclopentadienyl indium and combinations of H2O and O2 plasma
673Advanced surface passivation of epitaxial boron emitters for high-efficiency ultrathin crystalline silicon solar cells
674Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
675PEALD grown high-k ZrO2 thin films on SiC group IV compound semiconductor
676Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
677Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant
678Excellent resistive switching properties of atomic layer-deposited Al2O3/HfO2/Al2O3 trilayer structures for non-volatile memory applications
679In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
680Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition
681Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
682Corrosion barriers for silver-based telescope mirrors: comparative study of plasma-enhanced atomic layer deposition and reactive evaporation of aluminum oxide
683Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
684Measurements and modeling of the impact of radical recombination on silicon nitride growth in microwave plasma assisted atomic layer deposition
685AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing
686Improved Oxygen Diffusion Barrier Properties of Ruthenium-Titanium Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
687Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
688Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection
689Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
690Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
691Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
692Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties
693Sub-7-nm textured ZrO2 with giant ferroelectricity
694Plasma enhanced atomic layer deposition of zinc sulfide thin films
695Nitrogen-Doping of Bulk and Nanotubular TiO2 Photocatalysts by Plasma-Assisted Atomic Layer Deposition
696Evaluation of plasma parameters on PEALD deposited TaCN
697Characteristics of Cobalt Thin Films Deposited by Remote Plasma ALD Method with Dicobalt Octacarbonyl
698Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps
699Atomic layer deposition of titanium nitride from TDMAT precursor
700Atomic layer deposition of TiN for the fabrication of nanomechanical resonators
701RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor
702Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
703Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
704Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber
705Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
706Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
707Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
708Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
709Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition
710Top-down fabrication of fluorine-doped tin oxide nanopillar substrates for solar water splitting
711Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks
712Plasma-Enhanced ALD of Titanium-Silicon-Nitride Using TiCl4 , SiH4, and N2/H2/Ar Plasma
713Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds
714Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures
715Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
716Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
717Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
718Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
719Atomic layer deposition of InN using trimethylindium and ammonia plasma
720Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices
721New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se2 thin film solar cell
722Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors
723Light response behaviors of amorphous In-Ga-Zn-O thin-film transistors via in situ interfacial hydrogen doping modulation
724Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
725Characteristics of Ti-Capped Co Films Deposited by a Remote Plasma ALD Method Using Cyclopentadienylcobalt Dicarbonyl
726Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
727Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition
728Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications
729Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth
730Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
731Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH3
732SiCxNy-based resistive and threshold switching by using single precursor plasma-enhanced atomic layer deposition
733Formation of Nano-Crystalline Ru-Based Ternary Thin Films by Plasma-Enhanced Atomic Layer Deposition
734Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
735Atomic layer deposited (ALD) SnO2 anodes with exceptional cycleability for Li-ion batteries
736Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
737Plasma-enhanced atomic layer deposition of titanium vanadium nitride
738Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
739Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
740Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
741Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
742Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures
743Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition
744Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
745Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis
746Electron-enhanced atomic layer deposition of silicon thin films at room temperature
747Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash
748Crystalline growth of AlN thin films by atomic layer deposition
749Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
750Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
751Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
752Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
753Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures
754Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
755Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma
756Prevention of spontaneous combustion of cellulose with a thin protective Al2O3 coating formed by atomic layer deposition
757Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
758A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
759Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties
760Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor
761Influence of Al2O3 Gate Dielectric on Transistor Properties for IGZO Thin Film Transistor
762Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
763Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
764Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition
765Aluminum oxide – n-Si field effect inversion layer solar cells with organic top contact
766Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
767Plasma-Enhanced Atomic Layer Deposition of Nanostructured Gold Near Room Temperature
768Properties of AlN grown by plasma enhanced atomic layer deposition
769Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces
770Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
771Approximation of PE-MOCVD to ALD for TiN Concerning Resistivity and Chemical Composition
772Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
773Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
774Modal properties of a strip-loaded horizontal slot waveguide
775Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition
776Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
777A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
778Tribological properties of thin films made by atomic layer deposition sliding against silicon
779Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition
780Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
781Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films
782Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge(100) prepared by PEALD
783Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
784Optical and Electrical Properties of AlxTi1-xO Films
785Investigation of hydrogen impurities in PE-ALD AlN thin films by IBA methods
786Thickness and Morphology Dependent Electrical Properties of ALD-Synthesized MoS2 FETs
787Fabrication and Properties of GaN MIS Capacitors with a Remote-Plasma Atomic-Layer-Deposited Al2O3 Gate Dielectric
788Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
789Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
790Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
791Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
792Investigating the TiN film quality and growth behavior for plasma-enhanced atomic layer deposition using TiCl4 and N2/H2/Ar radicals
793Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition
794Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
795Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
796Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition
797Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
798PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
799Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
800Influence of plasma power on deposition mechanism and structural properties of MoOx thin films by plasma enhanced atomic layer deposition
801Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
802Metal-insulator-semiconductor structure using Ga2O3 layer by plasma enhanced atomic layer deposition
803Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
804Plasma-Enhanced Atomic Layer Deposition of Nickel Nanotubes with Low Resistivity and Coherent Magnetization Dynamics for 3D Spintronics
805TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
806Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
807Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
808Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
809Carbon content control of silicon oxycarbide film with methane containing plasma
810Low temperature temporal and spatial atomic layer deposition of TiO2 films
811Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor
812Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al2O3 thin films grown by Atomic Layer Deposition
813Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
814Moisture Barrier Properties of Al2O3 Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures
815Plasma-enhanced atomic layer deposition of Cu–Mn films with formation of a MnSixOy barrier layer
816Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia
817Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
818Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
819Atomic Layer Deposition of La2O3 Thin Films by Using an Electron Cyclotron Resonance Plasma Source
820Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
821On the role of nanoporosity in controlling the performance of moisture permeation barrier layers
822Plasma enhanced atomic layer deposition of gallium sulfide thin films
823Multiscale modeling for SiO2 atomic layer deposition for high-aspect-ratio hole patterns
824Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates
825Nucleation and growth of tantalum nitride atomic layer deposition on Al2O3 using TBTDET and hydrogen radicals
826Understanding the Oxygen Evolution Reaction Mechanism on CoOx using Operando Ambient-Pressure X-ray Photoelectron Spectroscopy
827Plasma-Enhanced Atomic Layer Deposition of p-Type Copper Oxide Semiconductors with Tunable Phase, Oxidation State, and Morphology
828Gadolinium nitride films deposited using a PEALD based process
829Atomic Layer Deposition of the Solid Electrolyte LiPON
830Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy
831Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor
832Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
833Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
834Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition
835Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment
836Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films
837Atomic layer deposition of YMnO3 thin films
838Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
839Interfacial Layer Properties of HfO2 Films Formed by Plasma-Enhanced Atomic Layer Deposition on Silicon
840Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx
841Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
842Hydrogen-plasma-assisted hybrid atomic layer deposition of Ir thin film as novel Cu diffusion barrier
843A Microwave Driven PE-ALD for Ultrathin Al2O3/ZnO Synthesis over Perovskite Layer
844Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
845Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
846Sub-nanometer heating depth of atomic layer annealing
847Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
848Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition
849Plasma-enhanced atomic layer deposition of BaTiO3
850Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
851α-Ga2O3 grown by low temperature atomic layer deposition on sapphire
852Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
853Plasma enhanced atomic layer deposition of Ga2O3 thin films
854Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD
855Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
856Plasma enhanced atomic layer deposition of magnesium oxide as a passivation layer for enhanced photoluminescence of ZnO nanowires
857Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity
858Evidence for low-energy ions influencing plasma-assisted atomic layer deposition of SiO2: Impact on the growth per cycle and wet etch rate
859Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
860A comparative study of AlN and Al2O3 based gate stacks grown by atomic layer deposition on InGaAs
861PEALD of Copper using New Precursors for Next Generation of Interconnections
862Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
863Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
864Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
865Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
866High-Quality Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
867Topographically selective deposition
868Atomic Layer Deposition and Electrical Properties of SrTiO3 Thin Films Grown Using Sr(C11H19O2)2, Ti(Oi-C3H7)4, and H2O