Thickness Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Thickness returned 858 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
13D structure evolution using metastable atomic layer deposition based on planar silver templates
2A Chemical Reaction Path Design for the Atomic Layer Deposition of Tantalum Nitride Thin Films
3A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD
4A comparative study of AlN and Al2O3 based gate stacks grown by atomic layer deposition on InGaAs
5A comparative study on electrical characteristics of crystalline AlN thin films deposited by ICP and HCPA-sourced atomic layer deposition
6A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
7A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films
8A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
9A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition
10A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
11A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
12A Microwave Driven PE-ALD for Ultrathin Al2O3/ZnO Synthesis over Perovskite Layer
13A PEALD Tunnel Dielectric for Three-Dimensional Non-Volatile Charge-Trapping Technology
14A route to low temperature growth of single crystal GaN on sapphire
15A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition
16Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM
17Advanced surface passivation of epitaxial boron emitters for high-efficiency ultrathin crystalline silicon solar cells
18Advanced thin conformal Al2O3 films for high aspect ratio mercury cadmium telluride sensors
19Advanced thin gas barriers film incorporating alternating structure of PEALD-based Al2O3/organic-inorganic nanohybrid layers
20Advances in the fabrication of graphene transistors on flexible substrates
21Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
22Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
23Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device
24ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications
25ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors
26ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors
27AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing
28AlN PEALD with TMA and forming gas: study of plasma reaction mechanisms
29Alumina films as gas barrier layers grown by spatial atomic layer deposition with trimethylaluminum and different oxygen sources
30Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition
31Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
32Aluminum oxide – n-Si field effect inversion layer solar cells with organic top contact
33Aluminum Oxide at the Monolayer Limit via Oxidant-Free Plasma-Assisted Atomic Layer Deposition on GaN
34Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
35Amorphous alumina thin films deposited on titanium: Interfacial chemistry and thermal oxidation barrier properties
36An Analysis of the Deposition Mechanisms involved during Self-Limiting Growth of Aluminum Oxide by Pulsed PECVD
37An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
38An improvement of HfO2/Ge interface by in situ remote N2 plasma pretreatment for Ge MOS devices
39Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
40Analysis of nitrogen species in titanium oxynitride ALD films
41Antioxidation properties of Ti0.83Al0.17N prepared using plasma-enhanced atomic layer deposition
42Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
43Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
44Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN
45Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
46Approximation of PE-MOCVD to ALD for TiN Concerning Resistivity and Chemical Composition
47Area selective deposition of TiO2 by intercalation of plasma etching cycles in PEALD process: A bottom up approach for the simplification of 3D integration scheme
48Area-Selective Atomic Layer Deposition of In2O3:H Using a µ-Plasma Printer for Local Area Activation
49Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
50Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
51Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
52Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors
53Atmospheric pressure plasma enhanced spatial ALD of silver
54Atmospheric pressure plasma enhanced spatial atomic layer deposition of SnOx as conductive gas diffusion barrier
55Atmospheric-Pressure Plasma-Enhanced Spatial ALD of SiO2 Studied by Gas-Phase Infrared and Optical Emission Spectroscopy
56Atomic hydrogen-assisted ALE of germanium
57Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy
58Atomic layer controlled deposition of silicon nitride with self-limiting mechanism
59Atomic layer deposited (ALD) SnO2 anodes with exceptional cycleability for Li-ion batteries
60Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices
61Atomic layer deposited HfO2/HfSixOyNz stacked gate dielectrics for metal-oxide-semiconductor structures
62Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallization
63Atomic layer deposited silicon dioxide films on nanomechanical silicon nitride resonators
64Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source
65Atomic Layer Deposition and Electrical Properties of SrTiO3 Thin Films Grown Using Sr(C11H19O2)2, Ti(Oi-C3H7)4, and H2O
66Atomic Layer Deposition and In-situ Characterization of Ultraclean Lithium Oxide and Lithium Hydroxide
67Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
68Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
69Atomic layer deposition growth of a novel mixed-phase barrier for seedless copper electroplating applications
70Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
71Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
72Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma
73Atomic Layer Deposition of Aluminum Nitride Thin films from Trimethyl Aluminum (TMA) and Ammonia
74Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
75Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions
76Atomic layer deposition of aluminum thin films using an alternating supply of trimethylaluminum and a hydrogen plasma
77Atomic layer deposition of amorphous Ni-Ta-N films for Cu diffusion barrier
78Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
79Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
80Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
81Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant
82Atomic layer deposition of copper thin film and feasibility of deposition on inner walls of waveguides
83Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
84Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors
85Atomic layer deposition of GaN at low temperatures
86Atomic Layer Deposition of HfO2 Thin Films on Ultrathin SiO2 Formed by Remote Plasma Oxidation
87Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
88Atomic layer deposition of high purity Ga2O3 films using liquid pentamethylcyclopentadienyl gallium and combinations of H2O and O2 plasma
89Atomic layer deposition of high-mobility hydrogen-doped zinc oxide
90Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
91Atomic layer deposition of InN using trimethylindium and ammonia plasma
92Atomic Layer Deposition of La2O3 Thin Films by Using an Electron Cyclotron Resonance Plasma Source
93Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
94Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
95Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries
96Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
97Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity
98Atomic Layer Deposition of Nickel by the Reduction of Preformed Nickel Oxide
99Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
100Atomic Layer Deposition of Niobium Nitride from Different Precursors
101Atomic layer deposition of platinum with enhanced nucleation and coalescence by trimethylaluminum pre-pulsing
102Atomic layer deposition of Ru from CpRu(CO)2Et using O2 gas and O2 plasma
103Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant
104Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
105Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor
106Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
107Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
108Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
109Atomic Layer Deposition of SiN for spacer applications in high-end logic devices
110Atomic layer deposition of stoichiometric In2O3 films using liquid ethylcyclopentadienyl indium and combinations of H2O and O2 plasma
111Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
112Atomic Layer Deposition of the Solid Electrolyte LiPON
113Atomic layer deposition of thin films as model electrodes: A case study of the synergistic effect in Fe2O3-SnO2
114Atomic layer deposition of TiN for the fabrication of nanomechanical resonators
115Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
116Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications
117Atomic layer deposition of titanium nitride from TDMAT precursor
118Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
119Atomic Layer Deposition of V1-xMoxO2 Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation
120Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
121Atomic layer deposition of WNx thin films using a F-free tungsten metal-organic precursor and NH3 plasma as a Cu-diffusion barrier
122Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection
123Atomic layer deposition of YMnO3 thin films
124Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
125Atomic layer epitaxy for quantum well nitride-based devices
126Atomic layer epitaxy of gallium arsenide with the use of atomic hydrogen
127Atomic layer epitaxy of germanium
128Atomic layer epitaxy of Si using atomic H
129Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis
130Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
131AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
132Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
133Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films
134Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
135Capacitance-voltage characteristics of gamma irradiated Al2O3, HfO2, and SiO2 thin films grown by plasma-enhanced atomic layer deposition
136Carbon content control of silicon oxycarbide film with methane containing plasma
137Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
138Challenges in spacer process development for leading-edge high-k metal gate technology
139Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes
140Characteristics of Al2O3 Thin Films Deposited Using Dimethylaluminum Isopropoxide and Trimethylaluminum Precursors by the Plasma-Enhanced Atomic-Layer Deposition Method
141Characteristics of ALD-GZO Films with Driven-in Zn and Zn/Mg Sources for the Applications to Optoelectronic Devices
142Characteristics of an Al2O3 Thin Film Deposited by a Plasma Enhanced Atomic Layer Deposition Method Using N2O Plasma
143Characteristics of Atomic-Layer-Deposited HfO2 Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer
144Characteristics of Cobalt Films Deposited by Using a Remote Plasma ALD Method with a CpCo(CO)2 Precursor
145Characteristics of Cobalt Thin Films Deposited by Remote Plasma ALD Method with Dicobalt Octacarbonyl
146Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
147Characteristics of HfO2 thin films grown by plasma atomic layer deposition
148Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
149Characteristics of Metal-Oxide-Semiconductor Field-Effect Transistors with HfO2/SiO2/Si and HfO2/SiOxNy/Si Stack Structures Formed by Remote Plasma Technique
150Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
151Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma
152Characteristics of Plasma-Enhanced Atomic Layer Deposited RuSiN as a Diffusion Barrier against Cu
153Characteristics of Plasma-Enhanced Atomic-Layer Deposited (PEALD) SnO2 Thin Films
154Characteristics of the HfO2 Thin Films Grown by Remote Plasma Atomic Layer Deposition Method on the Plasma Oxidized Si Substrate
155Characteristics of Thin Hf-Silicate Gate Dielectrics after Remote N2 and N2O Plasma Post-Treatments
156Characteristics of Ti-Capped Co Films Deposited by a Remote Plasma ALD Method Using Cyclopentadienylcobalt Dicarbonyl
157Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
158Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten
159Characteristics of WNxCy films deposited using remote plasma atomic layer deposition with (MeCp)W(CO)2(NO) for Cu diffusion barrier
160Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition
161Characteristics of ZrO2 gate dielectric deposited using Zr(t –butoxide) and Zr(NEt2)4 precursors by plasma enhanced atomic layer deposition method
162Characterization of HfOxNy thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas
163Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
164Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
165Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO2 Thin Films via Atomic Layer Deposition
166Chemical Reaction Mechanism in the Atomic Layer Deposition of TaCxNy Films Using tert-Butylimidotris(diethylamido)tantalum
167Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition
168Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
169Chemistry of SiNx thin film deposited by plasma-enhanced atomic layer deposition using di-isopropylaminosilane (DIPAS) and N2 plasma
170Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
171Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation
172Comparative study of ALD SiO2 thin films for optical applications
173Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET
174Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
175Comparative study of thermal and radical-enhanced methods for growing boron nitride films from diborane and ammonia
176Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
177Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors
178Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers
179Comparison between ZnO films grown by plasma-assisted atomic layer deposition using H2O plasma and O2 plasma as oxidant
180Comparison of gate dielectric plasma damage from plasma-enhanced atomic layer deposited and magnetron sputtered TiN metal gates
181Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials
182Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
183Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
184Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200°C
185Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
186Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
187Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
188Comparisons of alumina barrier films deposited by thermal and plasma atomic layer deposition
189Composite materials and nanoporous thin layers made by atomic layer deposition
190Composition, structure, and electrical characteristics of HfO2 gate dielectrics grown using the remote- and direct-plasma atomic layer deposition methods
191Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
192Conformal Fe, Co and Ni Films from Oxides and Nitrides Grown by Atomic Layer Deposition
193Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
194Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
195Continuous polymer films deposited on top of porous substrates using plasma-enhanced atomic layer deposition and molecular layer deposition
196Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
197Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
198Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
199Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
200Controlling the composition of Ti1-xAlxN thin films by modifying the number of TiN and AlN subcycles in atomic layer deposition
201Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
202Copper-ALD Seed Layer as an Enabler for Device Scaling
203Correlation between SiO2 growth rate and difference in electronegativity of metal-oxide underlayers for plasma enhanced atomic layer deposition using tris(dimethylamino)silane precursor
204Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
205Corrosion barriers for silver-based telescope mirrors: comparative study of plasma-enhanced atomic layer deposition and reactive evaporation of aluminum oxide
206Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
207Crystalline growth of AlN thin films by atomic layer deposition
208Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
209Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
210Damage evaluation in graphene underlying atomic layer deposition dielectrics
211DC characteristics of ALD-grown Al2O3/AlGaN/GaN MIS-HEMTs and HEMTs at 600°C in air
212Densification of Thin Aluminum Oxide Films by Thermal Treatments
213Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
214Deposition of Al2O3 by Using ECR-ALD for Organic Substrate Devices
215Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
216Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
217Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor
218Development of Manufacturable Solutions for the Direct Plating of Copper on Robust ALD-Grown Barriers
219Development of Space Divided PE-ALD System and Process Design for Gap-Fill Process in Advanced Memory Devices
220Dielectric barrier characteristics of Si-rich silicon nitride films deposited by plasma enhanced atomic layer deposition
221Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
222Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al2O3 Thin Films
223Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
224Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
225Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers
226Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier
227Edge-Site Nanoengineering of WS2 by Low-Temperature Plasma-Enhanced Atomic Layer Deposition for Electrocatalytic Hydrogen Evolution
228Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc-Tin Oxide Thin-Film Transistors
229Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy
230Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
231Effect of hydrogen peroxide pretreatment on ZnO-based metal-semiconductor-metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
232Effect of hydrogen plasma treatment on the passivation performance of TiOx on crystalline silicon prepared by atomic layer deposition
233Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
234Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
235Effect of Nitrogen Incorporation in HfO2 Films Deposited by Plasma-Enhanced Atomic Layer Deposition
236Effect of Oxygen Source on the Various Properties of SnO2 Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
237Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition
238Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition
239Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition
240Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
241Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
242Effect of Process Parameters on Remote PEALD for Highly Transparent ZnO Film Growth
243Effect of process parameters on surface morphology and characterization of PE-ALD SnO2 thin films for gas sensing
244Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO3 Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
245Effect of substrate on the growth and properties of MoS2 thin films grown by plasma-enhanced atomic layer deposition
246Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
247Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
248Effective Surface Passivation of InP Nanowires by Atomic-Layer-Deposited Al2O3 with POx Interlayer
249Effective work function modulation of the bilayer metal gate stacks by the Hf-doped thin TiN interlayer prepared by the in-situ atomic layer doping technique
250Effects of N2 RPN on the Structural and Electrical Characteristics of Remote Plasma Atomic Layer-Deposited HfO2 Films
251Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition
252Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
253Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems
254Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures
255Effects of Hydrogen Plasma Treatments on the Atomic Layer Deposition of Copper
256Effects of N2 remote plasma nitridation on the structural and electrical characteristics of the HfO2 gate dielectrics grown using remote plasma atomic layer deposition methods
257Effects of rapid thermal annealing on the properties of AlN films deposited by PEALD on AlGaN/GaN heterostructures
258Effects of Remote Plasma Pre-oxidation of Si Substrates on the Characteristics of ALD-Deposited HfO2 Gate Dielectrics
259Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3 gate dielectric thin films
260Efficiency enhancement of InGaN/GaN blue light-emitting diodes with top surface deposition of AlN/Al2O3
261Electrical and optical properties of TiO2 thin films prepared by plasma-enhanced atomic layer deposition
262Electrical and structural properties of conductive nitride films grown by plasma enhanced atomic layer deposition with significant ion bombardment effect
263Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
264Electrical Comparison of HfO2 and ZrO2 Gate Dielectrics on GaN
265Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods
266Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
267Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
268Electrically Excited Plasmonic Nanoruler for Biomolecule Detection
269Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
270Electrochemical Performance of Lithium-Nickel Oxide Thin Films Obtained with Use of Atomic Layer Deposition
271Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films
272Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
273Electron-enhanced atomic layer deposition of silicon thin films at room temperature
274Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
275Emerging Atomic Layer Deposition (ALD) Processes For Low Thermal Budget Flexible Electronics
276Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
277Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes
278Enhanced Barrier Performance of Engineered Paper by Atomic Layer Deposited Al2O3 Thin Films
279Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
280Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition
281Enhancement of barrier properties of aluminum oxide layer by optimization of plasma-enhanced atomic layer deposition process
282Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
283Enhancement of the Electrical Properties of Ga-doped ZnO Thin Films on Polycarbonate Substrates by Using a TiO2 Buffer Layer
284Enhancing the Wettability of High Aspect-Ratio Through-Silicon Vias Lined With LPCVD Silicon Nitride or PE-ALD Titanium Nitride for Void-Free Bottom-Up Copper Electroplating
285Epitaxial growth of AlN films via plasma-assisted atomic layer epitaxy
286Epitaxial Growth of Cubic and Hexagonal InN Thin Films via Plasma-Assisted Atomic Layer Epitaxy
287Evaluation of Low Temperature Silicon Nitride Spacer for High-k Metal Gate Integration
288Evaluation of plasma parameters on PEALD deposited TaCN
289Evaluation of Thermal Versus Plasma-Assisted ALD Al2O3 as Passivation for InAlN/AlN/GaN HEMTs
290Evaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
291Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric
292Excellent resistive switching properties of atomic layer-deposited Al2O3/HfO2/Al2O3 trilayer structures for non-volatile memory applications
293Fabrication and Properties of GaN MIS Capacitors with a Remote-Plasma Atomic-Layer-Deposited Al2O3 Gate Dielectric
294Fast PEALD ZnO Thin-Film Transistor Circuits
295Fermi Level Tuning of ZnO Films Through Supercycled Atomic Layer Deposition
296Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes
297Ferroelectricity of HfZrO2 in Energy Landscape With Surface Potential Gain for Low-Power Steep-Slope Transistors
298Field-enhanced direct tunneling in ultrathin atomic-layer-deposition-grown Au-Al2O3-Cr metal-insulator-metal structures
299Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
300Flatband voltage control in p-metal gate metal-oxide-semiconductor field effect transistor by insertion of TiO2 layer
301Flexible Al2O3/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition process
302Formation of Al2O3 Film on Si Substrate by Microwave Generated Remote Plasma Assisted Atomic Layer Deposition Technique
303Formation of Nano-Crystalline Ru-Based Ternary Thin Films by Plasma-Enhanced Atomic Layer Deposition
304Formation of Tantalum Carbide and Nitride Phases in Atomic Layer Deposition Using Hydrogen Plasma and tert-Butylimidotris( diethylamido)-tantalum (TBTDET), and its Effect on Material Properties
305Forming-free resistive switching of tunable ZnO films grown by atomic layer deposition
306Ga2O3 MOSFETs Using Spin-On-Glass Source/Drain Doping Technology
307GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
308Gadolinium nitride films deposited using a PEALD based process
309GaN metal-insulator-semiconductor high-electron-mobility transistor with plasma enhanced atomic layer deposited AlN as gate dielectric and passivation
310GaN Nanowire MOSFET With Near-Ideal Subthreshold Slope
311Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
312Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon
313Gate-tunable high mobility remote-doped InSb/In1-xAlxSb quantum well heterostructures
314GeSbTe deposition for the PRAM application
315Graphene-based MMIC process development and RF passives design
316Growing aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
317Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
318Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
319Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
320Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
321Growth and characterization of titanium oxide by plasma enhanced atomic layer deposition
322Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method
323Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
324Growth characteristics and electrical properties of La2O3 gate oxides grown by thermal and plasma-enhanced atomic layer deposition
325Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
326Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
327Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH3
328Growth mechanism and diffusion barrier property of plasma-enhanced atomic layer deposition Ti-Si-N thin films
329Growth of aluminum nitride films by plasma-enhanced atomic layer deposition
330Growth of aluminum nitride thin films prepared by plasma-enhanced atomic layer deposition
331Growth of Bi2O3 Films by Thermal- and Plasma-Enhanced Atomic Layer Deposition Monitored with Real-Time Spectroscopic Ellipsometry for Photocatalytic Water Splitting
332Growth of cubic-TaN thin films by plasma-enhanced atomic layer deposition
333Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
334Growth of rutile-TiO2 thin films via Sn doping and insertion of ultra-thin SnO2 interlayer by atomic layer deposition
335Growth of tantalum nitride film as a Cu diffusion barrier by plasma-enhanced atomic layer deposition from bis((2-(dimethylamino)ethyl)(methyl)amido)methyl(tert-butylimido)tantalum complex
336Growth, physical and electrical characterization of nickel oxide thin films prepared by plasma-enhanced atomic layer deposition using nickelocene and oxygen precursors
337HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition
338High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition
339High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates
340High Mobility (210cm2/Vs), High Capacitance (7.2uF/cm2) ZrO2 on GaN Metal Oxide Semiconductor Capacitor via ALD
341High mobility polycrystalline indium oxide thin-film transistors by means of plasma-enhanced atomic layer deposition
342High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
343High-Quality Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
344Highly Conductive HfNx Films Prepared by Plasma-Assisted Atomic Layer Deposition
345Highly stable all-inorganic CsPbBr3 nanocrystals film encapsulated with alumina by plasma-enhanced atomic layer deposition
346Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering
347Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
348Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
349Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes
350Hot-Wire Generated Atomic Hydrogen and its Impact on Thermal ALD in TiCl4/NH3 System
351Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation
352Hydrogen plasma-enhanced atomic layer deposition of copper thin films
353Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
354Hysteresis behaviour of top-down fabricated ZnO nanowire transistors
355Impact of AlN Interfacial Dipole on Effective Work Function of Ni and Band Alignment of Ni/HfO2/In0.53Ga0.47As Gate-Stack
356Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
357Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
358Impact of interface materials on side permeation in indirect encapsulation of organic electronics
359Impact of Ions on Film Conformality and Crystallinity during Plasma-Assisted Atomic Layer Deposition of TiO2
360Impact of nitrogen depth profiles on the electrical properties of crystalline high-K gate dielectrics
361Impact of Plasma-Assisted Atomic-Layer-Deposited Gate Dielectric on Graphene Transistors
362Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition
363Improved electrical performances of plasma-enhanced atomic layer deposited TaCxNy films by adopting Ar/H2 plasma
364Improved Electrical Properties of Crystalline ZrO2/Al2O3 Buffer Gate Stack with Double Nitridation
365Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS2 MOSFET with an AlN Interfacial Layer
366Improved Oxygen Diffusion Barrier Properties of Ruthenium-Titanium Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
367Improvement of Capacitance Equivalent Thickness, Leakage Current, and Interfacial State Density Based on Crystallized High-K Dielectrics/Nitrided Buffer Layer Gate Stacks
368Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD
369Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process
370Improvement of smooth surface of RuO2 bottom electrode on Al2O3 buffer layer and characteristics of RuO2/TiO2/Al2O3/TiO2/RuO2 capacitors
371In Situ Activation of an Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition
372In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
373In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
374In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
375In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
376In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition
377In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
378In situ spectroscopic ellipsometry study on the growth of ultrathin TiN films by plasma-assisted atomic layer deposition
379In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides
380In situ x-ray photoelectron emission analysis of the thermal stability of atomic layer deposited WOx as hole-selective contacts for Si solar cells
381In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition
382In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films
383In-system photoelectron spectroscopy study of tin oxide layers produced from tetrakis(dimethylamino)tin by plasma enhanced atomic layer deposition
384Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
385Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
386Influence of Al2O3 Gate Dielectric on Transistor Properties for IGZO Thin Film Transistor
387Influence of Al2O3 layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors
388Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
389Influence of Atomic Layer Deposition Temperatures on TiO2/n-Si MOS Capacitor
390Influence of atomic layer deposition valve temperature on ZrN plasma enhanced atomic layer deposition growth
391Influence of magnetic field on the reaction mechanisms of plasma-assisted atomic layer deposition of Al2O3
392Influence of oxidant source on the property of atomic layer deposited Al2O3 on hydrogen-terminated Si substrate
393Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films
394Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
395Influence of plasma parameters on the properties of ultrathin Al2O3 films prepared by plasma enhanced atomic layer deposition below 100C for moisture barrier applications
396Influence of plasma power on deposition mechanism and structural properties of MoOx thin films by plasma enhanced atomic layer deposition
397Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
398Influence of plasma-based in-situ surface cleaning procedures on HfO2/In0.53Ga0.47As gate stack properties
399Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition
400Influence of Surface Temperature on the Mechanism of Atomic Layer Deposition of Aluminum Oxide Using an Oxygen Plasma and Ozone
401Influence of the charge trap density distribution in a gate insulator on the positive-bias stress instability of amorphous indium-gallium-zinc oxide thin-film transistors
402Influence of the Deposition Temperature on the c-Si Surface Passivation by Al2O3 Films Synthesized by ALD and PECVD
403Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxide
404Influence of the polymeric substrate on the water permeation of alumina barrier films deposited by atomic layer deposition
405Influence of Working Pressure on the Al2O3 Film Properties in Plasma-Enhanced Atomic Layer Deposition
406Infrared and optical emission spectroscopy study of atmospheric pressure plasma-enhanced spatial ALD of Al2O3
407Infrared Study of Room Temperature Atomic Layer Deposition of SnO2 Using Sn(CH3)4 and Plasma Excited Humidified Argon
408Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
409Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor
410Inhibiting Metal Oxide Atomic Layer Deposition: Beyond Zinc Oxide
411Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
412Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
413Initial Growth and Crystallization Onset of Plasma Enhanced-Atomic Layer Deposited ZnO
414Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films
415Initial reaction of hafnium oxide deposited by remote plasma atomic layer deposition method
416Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
417Innovative remote plasma source for atomic layer deposition for GaN devices
418Integration of Atomic Layer Deposited Al2O3 Dielectrics with Graphene
419Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique
420Interface effect on dielectric constant of HfO2/Al2O3 nanolaminate films deposited by plasma-enhanced atomic layer deposition
421Interface engineering of ALD HfO2-based RRAM with Ar plasma treatment for reliable and uniform switching behaviors
422Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al2O3
423Interfaces Formed by ALD Metal Oxide Growth on Metal Layers
424Interfacial Layer Properties of HfO2 Films Formed by Plasma-Enhanced Atomic Layer Deposition on Silicon
425Interfacial Self-Cleaning during PEALD HfO2 Process on GaAs Using TDMAH/O2 with Different (NH4)2S Cleaning Time
426Interfacial, Electrical, and Band Alignment Characteristics of HfO2/Ge Stacks with In Situ-Formed SiO2 Interlayer by Plasma-Enhanced Atomic Layer Deposition
427Investigating the TiN film quality and growth behavior for plasma-enhanced atomic layer deposition using TiCl4 and N2/H2/Ar radicals
428Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
429Investigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization
430Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
431Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
432Large area, patterned growth of 2D MoS2 and lateral MoS2-WS2 heterostructures for nano- and opto-electronic applications
433Large-Scale Deposition and Growth Mechanism of Silver Nanoparticles by Plasma-Enhanced Atomic Layer Deposition
434Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
435Layer-by-layer epitaxial growth of GaN at low temperatures
436Layer-Controlled, Wafer-Scale, and Conformal Synthesis of Tungsten Disulfide Nanosheets Using Atomic Layer Deposition
437Light response behaviors of amorphous In-Ga-Zn-O thin-film transistors via in situ interfacial hydrogen doping modulation
438Long period gratings coated with hafnium oxide by plasma-enhanced atomic layer deposition for refractive index measurements
439Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition
440Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
441Low resistivity HfNx grown by plasma-assisted ALD with external rf substrate biasing
442Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
443Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
444Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
445Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
446Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
447Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition
448Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2 + 95% N2) plasma
449Low temperature plasma enhanced deposition of GaP films on Si substrate
450Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)
451Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
452Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
453Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications
454Low temperature temporal and spatial atomic layer deposition of TiO2 films
455Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
456Low Voltage Switching Characteristics of 60 nm Thick SrBi2Ta2O9 Thin Films Deposited by Plasma-Enhanced ALD
457Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3-Ar-H2 plasma treatment for capacitor electrodes
458Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
459Low-Temperature Atomic Layer Deposition of High Purity, Smooth, Low Resistivity Copper Films by Using Amidinate Precursor and Hydrogen Plasma
460Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells
461Low-temperature atomic layer deposition of TiO2, Al2O3,and ZnO thin films
462Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing
463Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma
464Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
465Low-Temperature Deposition of TiN by Plasma-Assisted Atomic Layer Deposition
466Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications
467Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
468Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application
469Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition
470Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
471Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
472Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells
473Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
474Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
475Low-temperature plasma-enhanced atomic layer deposition of tin oxide electron selective layers for highly efficient planar perovskite solar cells
476Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
477Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure
478Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor
479Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition
480Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
481Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates
482Measurements and modeling of the impact of radical recombination on silicon nitride growth in microwave plasma assisted atomic layer deposition
483Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si
484Metal-insulator-semiconductor structure using Ga2O3 layer by plasma enhanced atomic layer deposition
485Metallic indium segregation control of InN thin films grown on Si(100) by plasma-enhanced atomic layer deposition
486Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition
487Microscopic origin of bipolar resistive switching of nanoscale titanium oxide thin films
488Microwave properties of superconducting atomic-layer deposited TiN films
489Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber
490Modal properties of a strip-loaded horizontal slot waveguide
491Moisture Barrier Properties of Al2O3 Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures
492Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor
493MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
494Multiscale modeling for SiO2 atomic layer deposition for high-aspect-ratio hole patterns
495Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
496N-doped TiO2 nanotubes coated with a thin TaOxNy layer for photoelectrochemical water splitting: dual bulk and surface modification of photoanodes
497Nanochemistry, nanostructure, and electrical properties of Ta2O5 film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition
498Nanometer-Thick Conformal Pore Sealing of Self-Assembled Mesoporous Silica by Plasma-Assisted Atomic Layer Deposition
499Near room-temperature direct encapsulation of organic photovoltaics by plasma-based deposition techniques
500Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC
501New insights on the chemistry of plasma-enhanced atomic layer deposition of indium oxysulfide thin films and their use as buffer layers in Cu(In,Ga)Se2 thin film solar cell
502Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition
503Nitrogen-Doping of Bulk and Nanotubular TiO2 Photocatalysts by Plasma-Assisted Atomic Layer Deposition
504Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
505Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
506Nucleation and growth of tantalum nitride atomic layer deposition on Al2O3 using TBTDET and hydrogen radicals
507Obtaining low resistivity (~100 µΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
508On the role of nanoporosity in controlling the performance of moisture permeation barrier layers
509Optical and Electrical Properties of AlxTi1-xO Films
510Optical and Electrical Properties of TixSi1-xOy Films
511Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
512Optimization of Plasma Enhanced Atomic Layer Deposition Processes for Oxides, Nitrides and Metals in the Oxford Instruments FlexAL Reactor
513Optimization of the Surface Structure on Black Silicon for Surface Passivation
514Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study
515Oxide Charge Engineering of Atomic Layer Deposited AlOxNy/Al2O3 Gate Dielectrics: A Path to Enhancement Mode GaN Devices
516Passivation of InGaAs interface states by thin AlN interface layers for metal-insulator-semiconductor applications
517Patterned deposition by plasma enhanced spatial atomic layer deposition
518PEALD AlN: controlling growth and film crystallinity
519PEALD grown high-k ZrO2 thin films on SiC group IV compound semiconductor
520PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
521PEALD of Copper using New Precursors for Next Generation of Interconnections
522PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases
523PEALD of SiO2 and Al2O3 Thin Films on Polypropylene: Investigations of the Film Growth at the Interface, Stress, and Gas Barrier Properties of Dyads
524PEALD-Grown Crystalline AlN Films on Si(100) with Sharp Interface and Good Uniformity
525Pentacene-Thin Film Transistors with ZrO2 Gate Dielectric Layers Deposited by Plasma-Enhanced Atomic Layer Deposition
526Performance and retention characteristics of nanocrystalline Si floating gate memory with an Al2O3 tunnel layer fabricated by plasma-enhanced atomic layer deposition
527Perspectives on future directions in III-N semiconductor research
528Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
529Phase Formation in the Tantalum Carbonitride Film Deposited with Atomic Layer Deposition Using Ammonia
530Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
531Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
532Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
533Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
534Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
535Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN
536Plasma Enhanced Atomic Layer Deposition of Al2O3/SiO2 MIM Capacitors
537Plasma enhanced atomic layer deposition of aluminum sulfide thin films
538Plasma enhanced atomic layer deposition of Fe2O3 thin films
539Plasma enhanced atomic layer deposition of Ga2O3 thin films
540Plasma enhanced atomic layer deposition of gallium sulfide thin films
541Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
542Plasma enhanced atomic layer deposition of magnesium oxide as a passivation layer for enhanced photoluminescence of ZnO nanowires
543Plasma enhanced atomic layer deposition of molybdenum carbide and nitride with bis(tert-butylimido)bis(dimethylamido) molybdenum
544Plasma Enhanced Atomic Layer Deposition of Plasmonic TiN Ultrathin Films Using TDMATi and NH3
545Plasma Enhanced Atomic Layer Deposition of Ru-Ta composite film as a Seed Layer for CVD Cu filling
546Plasma Enhanced Atomic Layer Deposition of Ruthenium Thin Films Using Isopropylmethylbenzene-Cyclohexadiene-Ruthenium and NH3 Plasma
547Plasma enhanced atomic layer deposition of silicon nitride using neopentasilane
548Plasma Enhanced Atomic Layer Deposition of SiN:H Using N2 and Silane
549Plasma enhanced atomic layer deposition of SiNx:H and SiO2
550Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries
551Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases
552Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
553Plasma enhanced atomic layer deposition of zinc sulfide thin films
554Plasma enhanced atomic layer deposition of ZnO with diethyl zinc and oxygen plasma: Effect of precursor decomposition
555Plasma Enhanced Atomic Layer Deposition on Powders
556Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
557Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
558Plasma treatment to tailor growth and photoelectric performance of plasma-enhanced atomic layer deposition SnOx infrared transparent conductive thin films
559Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
560Plasma-Assisted ALD of an Al2O3 Permeation Barrier Layer on Plastic
561Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure
562Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
563Plasma-assisted ALD to functionalize PET: towards new generation flexible gadgets
564Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3
565Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics
566Plasma-Assisted Atomic Layer Deposition of Al2O3 at Room Temperature
567Plasma-assisted atomic layer deposition of Al2O3 moisture permeation barriers on polymers
568Plasma-Assisted Atomic Layer Deposition of Conductive Hafnium Nitride Using Tetrakis(ethylmethylamino)hafnium for CMOS Gate Electrode Applications
569Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
570Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds
571Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition
572Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
573Plasma-assisted atomic layer deposition of nickel oxide as hole transport layer for hybrid perovskite solar cells
574Plasma-Assisted Atomic Layer Deposition of Palladium
575Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry
576Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
577Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
578Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry
579Plasma-assisted atomic layer deposition of TiN/Al2O3 stacks for metal-oxide-semiconductor capacitor applications
580Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
581Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
582Plasma-Enhanced ALD of TiO2 Thin Films on SUS 304 Stainless Steel for Photocatalytic Application
583Plasma-Enhanced ALD of TiO2 Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe2)3] and O2 Plasma
584Plasma-Enhanced ALD of Titanium-Silicon-Nitride Using TiCl4 , SiH4, and N2/H2/Ar Plasma
585Plasma-enhanced ALD system for SRF cavity
586Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor
587Plasma-enhanced atomic layer deposited indium oxide film using a novel dimethylbutylamino-trimethylindium precursor for thin film transistors
588Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating
589Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)
590Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide
591Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
592Plasma-enhanced atomic layer deposition for plasmonic TiN
593Plasma-enhanced atomic layer deposition of amorphous Ru-Si-N thin film as a diffusion barrier of direct plating of Cu
594Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
595Plasma-enhanced atomic layer deposition of BaTiO3
596Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor
597Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp)2 as a Metal Precursor
598Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
599Plasma-enhanced atomic layer deposition of Cu–Mn films with formation of a MnSixOy barrier layer
600Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
601Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
602Plasma-Enhanced Atomic Layer Deposition of Ni
603Plasma-Enhanced Atomic Layer Deposition of Nickel Nanotubes with Low Resistivity and Coherent Magnetization Dynamics for 3D Spintronics
604Plasma-enhanced atomic layer deposition of nickel thin film using bis(1,4-diisopropyl-1,4-diazabutadiene)nickel
605Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
606Plasma-Enhanced Atomic Layer Deposition of Ru-TiN Thin Films for Copper Diffusion Barrier Metals
607Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
608Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
609Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor
610Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
611Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
612Plasma-enhanced atomic layer deposition of SiO2 for channel isolation of colloidal quantum dots phototransistors
613Plasma-enhanced atomic layer deposition of SnO2 thin films using SnCl4 and O2 plasma
614Plasma-Enhanced Atomic Layer Deposition of SrTa2O6 Thin Films Using Sr[Ta(OC2H5)5(OC2H4OCH3)]2 as Precursor
615Plasma-enhanced atomic layer deposition of superconducting niobium nitride
616Plasma-Enhanced Atomic Layer Deposition of Ta-N Thin Films
617Plasma-Enhanced Atomic Layer Deposition of TaCxNy Films with tert-Butylimido Tris-diethylamido Tantalum and Methane-Hydrogen Gas
618Plasma-Enhanced Atomic Layer Deposition of TaN Thin Films Using Tantalum-Pentafluoride and N2/H2/Ar Plasma
619Plasma-enhanced atomic layer deposition of tantalum nitride thin films using tertiary-amylimido-tris(dimethylamido)tantalum and hydrogen plasma
620Plasma-Enhanced Atomic Layer Deposition of Tantalum Nitrides Using Hydrogen Radicals as a Reducing Agent
621Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties
622Plasma-enhanced atomic layer deposition of TiCx films using tetrakis neopentyl titanium and applications to a diffusion barrier and contact material
623Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
624Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure
625Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
626Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
627Plasma-enhanced atomic layer deposition of titanium vanadium nitride
628Plasma-enhanced atomic layer deposition of tungsten nitride
629Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
630Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
631Plasma-enhanced atomic layer deposition of vanadium nitride
632Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium-ion battery electrode material
633Plasma-enhanced atomic layer deposition of zinc phosphate
634Plasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells
635Platinum thin films with good thermal and chemical stability fabricated by inductively coupled plasma-enhanced atomic layer deposition at low temperatures
636Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
637Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
638Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
639Preparation of Al2O3 and AlN Nanotubes by Atomic Layer Deposition
640Preparation of Ru thin film layer on Si and TaN/Si as diffusion barrier by plasma enhanced atomic layer deposition
641Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization
642Prevention of spontaneous combustion of cellulose with a thin protective Al2O3 coating formed by atomic layer deposition
643Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry
644Probing the Origin and Suppression of Vertically Oriented Nanostructures of 2D WS2 Layers
645Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
646Properties of AlN grown by plasma enhanced atomic layer deposition
647Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
648Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films
649Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash
650Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
651Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
652Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
653Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
654Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
655Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
656Radical-enhanced atomic layer deposition of Y2O3 via a beta-diketonate precursor and O radicals
657Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition
658Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
659Reaction mechanisms during plasma-assisted atomic layer deposition of metal oxides: A case study for Al2O3
660Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
661Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride
662Real-time growth study of plasma assisted atomic layer epitaxy of InN films by synchrotron x-ray methods
663Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
664Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
665Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
666Remote Plasma ALD of Platinum and Platinum Oxide Films
667Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
668Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
669Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
670Remote Plasma Atomic Layer Deposition of HfO2 Thin Films Using the Alkoxide Precursor Hf(mp)4
671Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N2 plasma for gate spacer
672Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma
673Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
674Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
675Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment
676Remote plasma-enhanced atomic layer deposition of metallic TiN films with low work function and high uniformity
677Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH3 Plasma
678Robust TaNx diffusion barrier for Cu-interconnect technology with subnanometer thickness by metal-organic plasma-enhanced atomic layer deposition
679Role of low-energy ion irradiation in the formation of an aluminum germanate layer on a germanium substrate by radical-enhanced atomic layer deposition
680Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
681Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
682Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
683Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition
684Role of the (Ta/Nb)Ox/Al2O3 interface on the flatband voltage shift for Al2O3/(Ta/Nb)Ox/Al2O3 multilayer charge trap capacitors
685Room temperature atomic layer deposition of TiO2 on gold nanoparticles
686Room temperature plasma enhanced atomic layer deposition for TiO2 and WO3 films
687Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
688Room-Temperature Atomic Layer Deposition of HfO2 By Using Remote Plasma Source
689Room-Temperature Atomic Layer Deposition of Platinum
690Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
691Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells
692Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
693RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor
694RT Atomic Layer Deposition of ZrO2 By Using Plasma Excited Water Vapor
695Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing
696Ru thin film grown on TaN by plasma enhanced atomic layer deposition
697Rutile-structured TiO2 deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode
698Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications
699Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps
700Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
701Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition
702Self-Limiting Growth of GaN at Low Temperatures
703Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
704Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
705SiCxNy-based resistive and threshold switching by using single precursor plasma-enhanced atomic layer deposition
706Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma
707Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD
708Silicon surface passivation by ultrathin Al2O3 films and Al2O3/SiNx stacks
709Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
710Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes
711Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach
712Spectroscopy and control of near-surface defects in conductive thin film ZnO
713Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen
714Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
715Stability of plasma-enhanced atomic layer deposited barrier films in biological solutions
716Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
717Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
718Strongly Disordered TiN and NbTiN s-Wave Superconductors Probed by Microwave Electrodynamics
719Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
720Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al2O3 Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO2/InxGa1-xAs (M = Hf|Zr, x = 0|0.53) Gate Stacks
721Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge(100) prepared by PEALD
722Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
723Structural and optical characterization of low-temperature ALD crystalline AlN
724Structural characteristics of epitaxial SnO2 films deposited on a- and m-cut sapphire by ALD
725Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
726Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
727Structural, optical, electrical and resistive switching properties of ZnO thin films deposited by thermal and plasma-enhanced atomic layer deposition
728Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
729Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells
730Study of Y2O3 Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition
731Study on deposition of Al2O3 films by plasma-assisted atomic layer with different plasma sources
732Study on the characteristics of aluminum thin films prepared by atomic layer deposition
733Sub-7-nm textured ZrO2 with giant ferroelectricity
734Sub-nanometer heating depth of atomic layer annealing
735Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
736Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
737Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
738Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
739Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
740Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
741Surface Infrared Spectroscopy during Low Temperature Growth of Supported Pt Nanoparticles by Atomic Layer Deposition
742Surface passivation of phosphorus-diffused n+-type emitters by plasma-assisted atomic-layer deposited Al2O3
743Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System
744Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
745Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
746Surface reactions of aminosilane precursors during N2 plasma-assisted atomic layer deposition of SiNx
747Surface treatments on AlGaN/GaN heterostructures for gate dielectric Al2O3 thin films grown by Atomic Layer Deposition
748Sustained hole inversion layer in a wide-bandgap metal-oxide semiconductor with enhanced tunnel current
749Symmetrical Al2O3-based passivation layers for p- and n-type silicon
750Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers
751Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition
752Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
753Synthesis and characterization of titanium silicon oxide thin films prepared by plasma enhanced atomic layer deposition
754Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
755Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement
756Synthesis of Pt@TiO2@CNTs Hierarchical Structure Catalyst by Atomic Layer Deposition and Their Photocatalytic and Photoelectrochemical Activity
757Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
758Ta-rich atomic layer deposition TaN adhesion layer for Cu interconnects by means of plasma-enhanced atomic layer deposition
759TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
760Tailoring Electron-Transfer Barriers for Zinc Oxide/C60 Fullerene Interfaces
761Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping
762TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
763Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition
764Temperature controlled Ru and RuO2 growth via O* radical-enhanced atomic layer deposition with Ru(EtCp)2
765Terahertz Quantum Plasmonics of Nanoslot Antennas in Nonlinear Regime
766Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
767Texture of atomic layer deposited ruthenium
768The Applications of Ultra-Thin Nanofilm for Aerospace Advanced Manufacturing Technology
769The Cut-Off Phenomenon Effect on ZrO2 Growth Using Remote Plasma-Enhanced Atomic Layer Deposition
770The effect of atomic layer deposition temperature on switching properties of HfOx resistive RAM devices
771The Effects of Annealing Ambient on the Characteristics of La2O3 Films Deposited by RPALD
772The effects of layering in ferroelectric Si-doped HfO2 thin films
773The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
774The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling Atomic Layer Deposition of InN Films
775The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
776The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
777The important role of water in growth of monolayer transition metal dichalcogenides
778The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
779The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
780The Integration of Plasma Enhanced Atomic Layer Deposition (PEALD) of Tantalum- Based Thin Films for Copper Diffusion Barrier Applications
781The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
782The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
783The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition
784The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
785Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
786Thermal and plasma enhanced atomic layer deposition of ultrathin TiO2 on silicon from amide and alkoxide precursors: growth chemistry and photoelectrochemical performance
787Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
788Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
789Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH3 on Particles Agitated in a Rotary Reactor
790Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition
791Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
792Thermodynamic properties and interfacial layer characteristics of HfO2 thin films deposited by plasma-enhanced atomic layer deposition
793Thickness and Morphology Dependent Electrical Properties of ALD-Synthesized MoS2 FETs
794Thin film GaP for solar cell application
795Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry
796Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
797TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD
798Tin Oxynitride Anodes by Atomic Layer Deposition for Solid-State Batteries
799TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
800Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivity
801Top-down fabrication of fluorine-doped tin oxide nanopillar substrates for solar water splitting
802Topographical selective deposition: A comparison between plasma-enhanced atomic layer deposition/sputtering and plasma-enhanced atomic layer deposition/quasi-atomic layer etching approaches
803Topographically selective deposition
804Tribological properties of thin films made by atomic layer deposition sliding against silicon
805Tunable band gap of III-Nitride alloys obtained by Plasma Enhanced Atomic Layer Deposition
806Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition
807Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications
808Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
809Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature
810Tuning of undoped ZnO thin film via plasma enhanced atomic layer deposition and its application for an inverted polymer solar cell
811Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
812Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD
813Ultra-Thin Aluminium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition for Corrosion Protection
814Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition
815Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3
816Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
817Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells
818Ultrathin Surface Coating Enables the Stable Sodium Metal Anode
819Ultraviolet photodetector based on MgxZn1-xO films using plasma-enhanced atomic layer deposition
820Understanding the effect of nitrogen plasma exposure on plasma assisted atomic layer epitaxy of InN monitored by real time grazing incidence small angle x-ray scattering
821Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
822Understanding the mechanisms of interfacial reactions during TiO2 layer growth on RuO2 by atomic layer deposition with O2 plasma or H2O as oxygen source
823Understanding the Oxygen Evolution Reaction Mechanism on CoOx using Operando Ambient-Pressure X-ray Photoelectron Spectroscopy
824Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization
825Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
826Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition
827Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
828Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
829WNx Film Prepared by Atomic Layer Deposition using F-Free BTBMW and NH3 Plasma Radical for ULSI Applications
830Work function tuning of plasma-enhanced atomic layer deposited WCxNy electrodes for metal/oxide/semiconductor devices
831Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition
832XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition
833XPS study of homemade plasma enhanced atomic layer deposited La2O3/ZrO2 bilayer thin films
834ZnO Thin Films Fabricated by Plasma-Assisted Atomic Layer Deposition
835ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
836ZrO2 Gate Dielectric Deposited by Plasma-Enhanced Atomic Layer Deposition Method
837ZrO2 Thin Film Deposition on TiN by Plasma Enhanced Atomic Layer Deposition Using Cyclopentadienyltris(dimetylamino)zirconium
838α-Ga2O3 grown by low temperature atomic layer deposition on sapphire