Plasma enhanced atomic layer deposition derived from earlier thermal ALD research. Early PEALD work was performed primarily on homemade ALD systems further customized with a plasma source. In recent years, multiple vendors have begun offering commercial PEALD systems to researchers. Below is a list of hardware sets identified in the literature. Click on a hardware name to see a list of papers discussing work done on that system.
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: email@example.com
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