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Deposition Hardware in the Plasma Enhanced Atomic Layer Deposition Publication Database
Plasma enhanced atomic layer deposition derived from earlier thermal ALD research. Early PEALD work was performed primarily on homemade ALD systems further customized with a plasma source. In recent years, multiple vendors have begun offering commercial PEALD systems to researchers. Below is a list of hardware sets identified in the literature. Click on a hardware name to see a list of papers discussing work done on that system.