Oxford Instruments Plasmalab 100 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Oxford Instruments Plasmalab 100 hardware returned 11 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low temperature plasma enhanced deposition of GaP films on Si substrate
2Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
3Influence of PE-ALD of GaP on the Silicon Wafers Quality
4Capacitance characterization of GaP/n-Si structures grown by PE-ALD
5n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
6Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
7Study of GaP/Si Heterojunction Solar Cells
8Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
9Thin film GaP for solar cell application
10Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
11Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition