Oxford Instruments Plasmalab 100 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Oxford Instruments Plasmalab 100 hardware returned 11 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low temperature plasma enhanced deposition of GaP films on Si substrate
2Thin film GaP for solar cell application
3Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
4Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
5Capacitance characterization of GaP/n-Si structures grown by PE-ALD
6Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
7Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
8n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
9Influence of PE-ALD of GaP on the Silicon Wafers Quality
10Study of GaP/Si Heterojunction Solar Cells
11Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD