Oxford Instruments Plasmalab 100 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Oxford Instruments Plasmalab 100 hardware returned 7 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Capacitance characterization of GaP/n-Si structures grown by PE-ALD
2	Influence of PE-ALD of GaP on the Silicon Wafers Quality
3	Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
4	Low temperature plasma enhanced deposition of GaP films on Si substrate
5	n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
6	Study of GaP/Si Heterojunction Solar Cells
7	Thin film GaP for solar cell application

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