Oxford Instruments Plasmalab 100 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Oxford Instruments Plasmalab 100 hardware returned 11 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
2Capacitance characterization of GaP/n-Si structures grown by PE-ALD
3Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
4Study of GaP/Si Heterojunction Solar Cells
5Low temperature plasma enhanced deposition of GaP films on Si substrate
6Thin film GaP for solar cell application
7Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
8Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
9n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
10Influence of PE-ALD of GaP on the Silicon Wafers Quality
11Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD