Oxford Instruments Plasmalab 100 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Oxford Instruments Plasmalab 100 hardware returned 11 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Influence of plasma on electrophysical properties of the GaP/n-Si isotype heterojunction grown by PE-ALD
2Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation
3Optical emission spectroscopy of gallium phosphide plasma-enhanced atomic layer deposition
4n-GaP/p-Si Heterojunction Solar Cells Fabricated by PE-ALD
5Influence of PE-ALD of GaP on the Silicon Wafers Quality
6Lateral conductivity of n-GaP/p-Si heterojunction with an inversion layer
7Capacitance characterization of GaP/n-Si structures grown by PE-ALD
8Study of GaP/Si Heterojunction Solar Cells
9Low temperature plasma enhanced deposition of GaP films on Si substrate
10Interface Properties of GaP/Si Heterojunction Fabricated by PE-ALD
11Thin film GaP for solar cell application