On-line Plasma Enhanced Atomic Layer Deposition Theses

As I scour the web looking for new plasma enhanced atomic layer deposition publications to put in the database, I often come across theses which discuss our favorite topic. Often, the information in theses is superior to those in other types of publications because size limitations are removed and the authors want to make sure the work they did is fully documented. Below are some of the theses I have found on the web. I will continue to add them here as I find them.

If you know of one I missed, send me an e-mail at marksowa@plasma-ald.com

Addressing optical, recombination and resistive losses in crystalline silicon solar cellsThomas G. AllenThe Australian National University2017
Advanced precursor design for atomic layer depositionand chemical vapour deposition of gold metalMatthew B. E. GriffithsCarleton University2020
Advantages and challenges of plasma enhanced atomic layer depositionJan MusschootGhent University2011
ALD Processes and Applications to Nanostructured Electrochemical Energy Storage DevicesXinyi ChenUniversity of Maryland2013
Area selective atomic layer deposition of Si-based materialsEkaterina A. FilatovaTyndall National Institute, University College Cork2019
Area Selective Atomic Layer Deposition of Silicon Dioxide on Silicon Dioxide Using Surface Passivation of Copper Non-Growth SurfaceRohit Narayanan Kavassery RameshColorado School of Mines2022
Area-selective atomic layer deposition of Al2O3Athanasios AngelidisEindhoven University of Technology2019
Atomic layer deposited nickel oxide for perovskite solar cellsAlgirdas DučinskasEindhoven University of Technology2018
Atomic layer deposition and characterization of rare earth oxides for innovation in microelectronicsLuca LamagnaUniversità degli Studi di Milano-Bicocca2009
Atomic Layer Deposition and Metal Organic Chemical Vapour Deposition of Materials for Photovoltaic ApplicationsSarah Louise HindleyUniversity of Liverpool2014
Atomic Layer Deposition Enabled Integration of Multiferroic CompositesJeffrey ChangUniversity of California - Los Angeles (UCLA)2018
Atomic Layer Deposition Enabled Synthesis of Multiferroic NanostructuresCalvin D. PhamUniversity of California - Los Angeles (UCLA)2015
Atomic Layer Deposition for Lithium-Ion BatteriesFelix MattelaerGhent University2017
Atomic layer deposition for preparation of TiSiO2 thin filmsJúlius VidaMasarykova Univerzita2017
Atomic Layer Deposition for Surface Engineering of PowdersDelphine LongrieGhent University2013
Atomic Layer Deposition of BiVO4 for PhotocatalysisJuha OjalaUniversity of Helsinki2022
Atomic layer deposition of copper – study through density functional theoryGangotri DeyTyndall National Institute, University College Cork2014
Atomic layer deposition of III-nitrides and metal oxides : their application in area selective ALDAli HaiderBilkent University2017
Atomic Layer Deposition of Metal Oxide Thin Films and Nanostructuresİnci DönmezBilkent University2013
Atomic Layer Deposition of Multi-Insulator Metal-Insulator-Metal CapacitorsDustin Zachary AustinOregon State University2017
Atomic Layer Deposition of Noble Metal NanoparticlesMatthieu J. WeberEindhoven University of Technology2014
Atomic layer deposition of photovoltaicsMelissa M. McCarthyTyndall National Institute, University College Cork2019
Atomic Layer Deposition of Platinum: from surface reactions to nanopatterningAdriaan J. M. MackusEindhoven University of Technology2013
Atomic layer deposition of Ruthenium thin films using oxygenR. O. F. VerkuijlenEindhoven University of Technology2009
Atomic Layer Deposition of Solid Electrolytes for Beyond Lithium-Ion BatteriesAlexander Campbell KozenUniversity of Maryland2015
Atomic Layer Deposition of Strontium Titanate: from material control to nanoscale devicesValentino LongoEindhoven University of Technology2014
Atomic Layer Deposition of TaN, NbN, and MoN Films for Cu MetallizationsPetra AlénUniversity of Helsinki2005
Atomic Layer Deposition: from Reaction Mechanisms to 3D integrated Micro batteriesHarm C. M. KnoopsEindhoven University of Technology2011
Chalcogen-Carbon Nanocomposite Cathodes For Rechargeable Lithium BatteriesJung Tae LeeGeorgia Institute of Technology2014
Characterization of Plasma-Enhanced Atomic Layer Deposited Ga2O3 using Ga(acac)3 On GaNMei HaoArizona State University2018
Copper Diffusion Barrier Deposition on Integrated Circuit Devices by Atomic Layer Deposition TechniqueKai-Erik ElersUniversity of Helsinki2008
Deposition of Hydrogen-Doped Indium Oxide Thin Films Using Atmospheric-Pressure Plasma-Enhanced Spatial Atomic Layer DepositionAnusha VaranasiDelft University of Technology2017
Double-Gate, Tri-Layer, and Vertical ZnO TFTs and CircuitsKaige SunThe Pennsylvania State University2015
Electrical Properties and Device Applications of ALD ZnO and GaN Thin FilmsS. BolatBilkent University2014
Electrodynamics of strongly disordered superconductorsP. C. J. J. CoumouDelft University of Technology2015
Electron Enhanced Atomic Layer Deposition (EE-ALD) for Room Temperature Growth of Gallium Nitride, Silicon, and Boron Nitride FilmsJaclyn K. SprengerUniversity of Colorado, Boulder2018
Etude des dépôts par plasma ALD de diélectriques à forte permittivité diélectrique (dits ” High-K ”) pour les applications capacités MIMD. MonnierInstitut National Polytechnique de Grenoble - INPG2010
Etude thermodynamique et élaboration de dépôts métalliques (W-N-C, Ti-N-C) par PEALD (Plasma Enhanced Atomic Layer Deposition) pour la réalisation d’électrodes de capacités Métal/Isolant/Métal dans les circuits intégrésRym BenaboudInstitut National Polytechnique de Grenoble - INPG2009
Fabrication, Characterization, and Simulation of Highly-Scaled III-V MOS Devices Vallen Gary RezazadehUniversity of Alberta2017
Film damage by photons, ions and radicals during plasma-enhanched atomic layer depositionM. SmitsA*STAR (Agency for Science, Technology and Research)2019
From sunlight to green hydrogen - metal oxides as extremely thin absorbers for photoelectrochemical water splittingMatthias J. MüllerTechnische Universität Berlin2021
High-κ Complex Oxides for Advanced Gate Dielectric Applications Grown by Atomic Layer DepositionKaveh AhadiUniversity of Alberta2016
Hot-wire assisted atomic layer deposition of Tungsten filmsMengdi YangUniversity of Twente2018
Hydrogen plasma-assisted spatial atomic layer deposition of SnOxAndy van der VeldeEindhoven University of Technology2019
Hydrogenated Indium Oxide (IO:H) by Plasma Enhanced Spatial Atomic layer deposition for thin film PV applicationSaksham PandeyDelft University of Technology2019
Improving Dielectric Thin Films for Metal Insulator Metal Diodes and Perovskite Solar CellsAbdullah H. AlshehriUniversity of Waterloo2021
In situ infrared spectroscopy for plasma-assisted ALD of SiNx filmsLidewij E. CornelissenEindhoven University of Technology2015
Influence of plasma parameters in pulsed microwave and radio frequency plasmas on the properties of gas barrier films on plasticsFelix MitschkerRuhr-University Bochum2018
Interface design for silicon-based anodes for lithium-ion batteriesHongzheng ZhuUniversity of British Columbia2021
Low-Temperature Plasma Enhanced Atomic Layer Deposition of Silicon Nitride Thin Films for Encapsulation of Flexible OLEDsJi Min KimSeoul National University2018
Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Silicon Dioxide and Aluminum OxideZhen ZhuAalto University2019
Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin filmsMari NapariUniversity of Jyväskylä2017
Materials Passivation and Synthesis Using Atomic Layer Deposition-Based TechniquesScott Toshio UedaUniversity of California - San Diego2021
Mechanisms controlling silicon nitride growth by plasma-enhanced atomic layer depositionKoen de PeuterEindhoven University of Technology2014
Microscopic Modeling, Machine Learning-Based Modeling and Optimal Operation of Thermal and Plasma Atomic Layer DepositionYangyao DingUniversity of California - Los Angeles (UCLA)2021
Microwave Plasma Assisted ALD Development for the Deposition of Gate Oxides & ALD of High-k DielectricsSubin ThomasCochin University of Science and Technology2015
Modeling and In Situ Characterization of the Conformality of Atomic Layer Deposition in High Aspect Ratio Structures and Nanoporous MaterialsJolien DendoovenGhent University2012
Multiscale Computational Fluid Dynamics Modeling of Thermal and Plasma Atomic Layer Deposition: Application to Chamber Design and Process ControlYichi (UCLA) ZhangUniversity of California - Los Angeles (UCLA)2021
Nanoengineering of Two-Dimensional WS2 by Atomic Layer DepositionShashank BalasubramanyamEindhoven University of Technology2020
Nanolayer surface passivation schemes for silicon solar cellsGijs DingemansEindhoven University of Technology2011
Nitride Based Metal Insulator Semiconductor Heterostructure Material and Device Design and CharacterizationJiechen WuUniversity of California - Los Angeles (UCLA)2014
On the conformality of silicon oxide prepared by plasma atomic layer deposition - effect of process conditions on the recombination of oxygen radicalsJ. H. DeijkersEindhoven University of Technology2020
On the Impact and Growth of Plasma-enhanced Atomic Layer Deposition High-k Dielectrics on 2D CrystalsKatherine M. PriceDuke University2019
PEALD and PECVD inorganic layers: Microstructure characterization and moisture permeation barrier propertiesE.R.J. van BeekumEindhoven University of Technology2012
PECVD, Spatial ALD, and PEALD Zinc Oxide Thin Film TransistorsJie SunThe Pennsylvania State University2008
Photoinduced Charge Transfer at Metal Oxide/Oxide Interfaces Prepared with Plasma Enhanced Atomic Layer DepositionManpuneet KaurArizona State University2016
Plasma assisted chemical deposition (CVD/ALD) and integration of Ti(Al)N and Ta(Al)N for sub-20 nm metal gateFabien PiallatCEA - Grenoble2014
Plasma Enhanced Atomic Layer Deposition of Thin Film YSZ Electrolytes Wenfei ZhangUniversity of Alberta2017
Plasma enhanced atomic layer deposition ZnO thin film transistors for large area circuit applicationsYuanyuan LiThe Pennsylvania State University2013
Plasma-assisted atomic layer deposition of III-nitride thin filmsÇağla ÖzgitBilkent University2014
Plasma-Assisted Atomic Layer Deposition of Metal Oxides and NitridesS. B. S. HeilEindhoven University of Technology2008
Plasma-assisted atomic layer deposition: an in situ diagnostic studyE. LangereisEindhoven University of Technology2008
Plasma-enhanced atomic layer deposition of binary metal oxides as gas barrier layers on polymersMaximilian GebhardRuhr-University Bochum2017
Plasma-enhanced atomic layer deposition of transition metal phosphatesThomas DobbelaereGhent University2017
Plasma-Enhanced Atomic Layer Deposition Zinc Oxide Flexible Thin Film ElectronicsDalong ZhaoThe Pennsylvania State University2010
Plasma-Enhanced Atomic Layer Deposition Zinc Oxide for Multifunctional Thin Film ElectronicsDevin A. MoureyThe Pennsylvania State University2010
Plasma-Surface Interaction in Plasma-Assisted Atomic Layer DepositionH. B. ProfijtEindhoven University of Technology2012
Radical Enhanced Atomic Layer Deposition of Metals and OxidesAntti NiskanenUniversity of Helsinki2006
Remote Plasma Deposition of Metal Oxides: Routes for Controlling the Film GrowthIoana VolintiruEindhoven University of Technology2008
Schottky Nanodiodes Based on Zinc Oxide Thin FilmsMei ShenUniversity of Alberta2017
Selective Atomic Layer Deposition and Etching of OxidesAlfredo MameliEindhoven University of Technology2018
Semiconductor quantum structures for applications in the near infrared and blue regionsPäivi MattilaAalto University2016
Study of amorphous metals for nano-scale electronic devicesJiaomin OuyangStanford University2015
Study of Thermal and Plasma Enhanced Atomic Layer Deposition of AlN and Al2O3/TiO2 Films for Diverse ApplicationsPerttu SippolaAalto University2019
Surface Reactions During Atomic Layer Deposition of Cobalt PhosphateSander H.L. RaaijmakersA*STAR (Agency for Science, Technology and Research)2019
Surface smoothing using atomic layer deposition and etchingS.H. GerritsenEindhoven University of Technology2020
Tailoring Absorption in Optical Thin Films Using Atomic Layer Deposition of High Quality Titanium Nitride Sasha Woodward-GagnéPolytechnique Montréal2019
Templated Synthesis of Porous Materials via Atomic Layer DepositionShaoren DengGhent University2015
The Use of Atomic Layer Deposition in Hybrid Hermetic Barriers for Medical Devices: ALD Nucleation and Plasma Activation InfluenceLaura Astoreca AlvarezGhent University2022
Thermal and plasma-enhanced atomic layer deposition: the study of and employment in various nanotechnology applicationsAlexander Pyymaki PerrosAalto University2015
Thermal and radical enhanced atomic layer deposition of films containing boron, nitrogen and carbonRamazan Oguzhan ApaydinUniversity of Twente2020
Thermal Annealing of AlN Thin Films Fabricated by Plasma-Enhanced Atomic Layer Deposition for GaN EpitaxyLauri RiuttanenAalto University2010
Titanium nitride thin-film bias resistors for AC coupled segmented silicon detectorsJennifer OttUniversity of Helsinki2016
Understanding and Controlling Atomic Layer Deposition of Platinum and Platinum OxideIvo Johannes Maria ErkensEindhoven University of Technology2014
X-ray reflectance and infrared spectroscopy study of plasma enhanced atomic layer deposited Al2O3 and SiO2Elena OstrovskaiaAalto University2017
ZnO Thin Film Electronics For More Than DisplaysJose Israel RamirezThe Pennsylvania State University2015