Jolien Dendooven Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jolien Dendooven returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
2Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
3Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing
4Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
5Independent tuning of size and coverage of supported Pt nanoparticles using atomic layer deposition
6Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films
7Manganese oxide films with controlled oxidation state for water splitting devices through a combination of atomic layer deposition and post-deposition annealing
8Mobile setup for synchrotron based in situ characterization during thermal and plasma-enhanced atomic layer deposition
9Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
10On the determination of χ(2) in thin films: a comparison of one-beam second-harmonic generation measurement methodologies
11Plasma enhanced atomic layer deposition of Ga2O3 thin films
12Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
13Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
14Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
15Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality