Title: Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
Info: Journal of The Electrochemical Society, 157(4) G111-G116 (2010)
J.A. Woollam M-2000
Conformality, Step Coverage
OES, Optical Emission Spectroscopy
Ocean Optics QE65000 Spectrometer
Atomic Layer Deposition
Novel macroscopic, high aspect ratio structure.
Available in Dendooven PhD thesis.
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