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  • Plasma-Enhanced Atomic Layer Deposition
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Jan Musschoot Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jan Musschoot returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Texture of atomic layer deposited ruthenium
2TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
3Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
4Atomic layer deposition of titanium nitride from TDMAT precursor
5Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
6Ru thin film grown on TaN by plasma enhanced atomic layer deposition
7Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
8Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
9Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality