2022 Year in Review

February 2023 Stats


The publication database currently has 1673 entries.
204 Films
279 Precursors
78 Dep Hardware Sets
253 Characteristics
91 Theses
5136 Authors

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2021 Year in Review
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Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes

Jan Musschoot Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jan Musschoot returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ru thin film grown on TaN by plasma enhanced atomic layer deposition
2Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
3TaCN growth with PDMAT and H2/Ar plasma by plasma enhanced atomic layer deposition
4Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
5Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
6Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
7Texture of atomic layer deposited ruthenium
8Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N2 or NH3 plasma
9Atomic layer deposition of titanium nitride from TDMAT precursor

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