Precursors and Gases in the Plasma Enhanced Atomic Layer Deposition Publication Database

A wide variety of chemical precursors have been investigated for applicability to plasma enhanced atomic layer deposition. Some precursors have proven themselves to be extremely useful while others have failed to yield useful processes. The publications discussing deposition successes will be of critical importance to researchers looking to utilize PEALD films in their work. Deposition failures can be useful as well as they will steer you clear of processes that did not work or provide satisfactory film properties.

Below is a table which lists all the precursor chemicals and plasma gases which have been discussed in the publications included in the plasma-ald.com database so far. Click on the chemical name to get a list of publications that have used that precursor.

-

123-54-6

Acetylacetone

7440-37-1

Ar, Argon

75-73-0

CF₄, Tetrafluoromethane, Carbon Tetrafluoride

286-20-4

7782-39-0

107-21-1

1333-74-0

7440-59-7

7439-90-9

7440-01-9

7783-54-2

NF₃, Nitrogen Trifluoride

Unknown

Ag

0-0-0

Ag(DMP)(TBP), (2,2-dimethylpropionato) silver(I) tributylphosphine

0-0-0

Ag(DMP)(TEP), (2,2-dimethylpropionato) silver(I) triethylphosphine

165461-74-5

Ag(FOD)(PEt₃), Triethylphosphine (6,6,7,7,8,8,8- heptafluoro-2,2- dimethyl-3,5- octanedionate) silver(I)

Al

0-0-0

2DMAAl, (Me₂N)₂AlH₂, bis(dimethylamido)alane

32093-39-3

3DMAAl, (Me₂N)₃Al, (Me₂N)₆Al₂, Tris (DiMethylAmido) Aluminum(III)

0-0-0

Al(CD₃)₃, deuterated trimethyl aluminum, deuterated TMA

555-75-9

Al(OEt)₃, Al(OC₂H₅)₃, Aluminum Ethoxide, Aluminum Triethoxide, Triethoxyaluminum, Aluminium Triethanolate

124330-23-0

Alane N,N-dimethylethylamine, (CH₃)₂(C₂H₅)N:AlH₃, DMEAA

7446-70-0

AlCl₃, Aluminum Trichloride

555-31-7

aluminum isopropoxide, Al(O-i-Pr)₃

2269-22-9

ATSB, Al(OsBu)₃, Al(OCHMeEt)₃, Al[OCH(CH₃)C₂H₅]₃, Aluminum tri-sec-butoxide

0-0-0

DMAD, [3-(Dimethylamino)propyl](dimethyl) aluminium

6063-89-4

DMAI, dimethylaluminum isopropoxide, Me₂Al(O-i-Pr)₃

865-37-2

DMAlH, Dimethylaluminumhydride, Me₂AlH, (CH₃)₂AlH

97-93-8

TEA, Al(C₂H₅)₃, AlEt₃, Triethyl Aluminum

75-24-1

TMA, Trimethylaluminum, Trimethylalumane, AlMe₃, Al(CH₃)₃

As

7784-42-1

AsH₃, Arsine

Au

33012-33-8

Trimethylphosphino Trimethyl Gold(III), Trimethyl Trimethylphosphine Gold(III)

B

4375-83-1

3DMAB, TDMAB, (Me₂N)₃B, (CH₃)₂N)₃B, Tris(dimethylamido)borane

0-0-0

3EMAB, TEMAB, (EtMeN)₃B, (C₂H₅CH₃)N)₃B, Tris(ethylmethylamido)borane

121-43-7

B(OMe)₃, Trimethyl borate, Boric acid trimethyl ester, Methyl borate

19287-45-7

B₂H₆, Diborane, Boroethane, Boron hydride, Diboron hexahydride

97-94-9

TEB, BEt₃, B(C₂H₅)₃, TriEthylBoron, TriEthylBorane

Ba

210758-43-3

Bis(n-propyl tetramethyl cyclopentadienyl) barium, Ba[(n-Pr)(Me)₄Cp]₂

147658-83-1

Bis(triisopropyl cyclopentadienyl) barium, Ba(ⁱPr₃C_p)₂

Be

542-63-2

DEB, DiEthylBeryllium, BeEt₂, Be(C₂H₅)₂

Bi

603-33-8

Bi(C₆H₅)₃, Triphenyl Bismuth

142617-53-6

Bi(TMHD)₃, Bi(THD)₃, tris(2,2,6,6-tetramethyl- 3,5-heptanedionato) bismuth, Bismuth dipivaloylmethanate

C

71-43-2

Benzene, C₆H₆

558-13-4

Carbon tetrabromide, CBr₄

74-82-8

CH₄, Methane

74-85-1

Ethylene, Ethene, C₂H₄

Ce

122528-16-9

tris(isopropylcyclopentadienyl) cerium, Ce(i-PrCp)₃

Co

0-0-0

bis(methylcyclopentadienyl) cobalt, Co(MeCp)₂

1011477-51-2

Bis(N-t-butyl-N'-ethylpropanimidamidato) cobalt(II)

635680-58-9

Bis(N,N'-diisopropylacetamidinato)cobalt

55940-05-1

Co(EtCp)₂, Bis(EthylCyclopentadienyl) Cobalt(II)

13986-53-3

Co(TMHD)₂, Co(THD)₂, bis(2,2,6,6-tetramethyl-3,5-heptanedionato) cobalt(II), Cobalt dipivaloylmethanate

1277-43-6

cobaltacene, bis(cyclopentadienyl)cobalt, Cp₂Co

0-0-0

Cyclopentadienyl Isopropyl Acetamidinato-Cobalt, [Co(CpAMD)]

12078-25-0

Dicarbonylcyclopentadienylcobalt, CpCo(CO)₂

56792-69-9

Dicobalt Hexacarbonyl Tert-ButylAcetylene (CCTBA)

10210-68-1

dicobalt octacarbonyl, Co₂(CO)₈

Cr

21679-31-2

Chromium(III) acetylacetonate, Cr(C₅H₇O₂)₃, Cr(acac)₃

Cu

0-0-0

(HFAC)Cu(VTMOS), hexafluoroacetylacetonato copper vinyltrimethoxysilane

0-0-0

[Cu((Py)CHCOCF₃)₂]₂

0-0-0

1,3-diisopropyl-imidazolin-2-ylidene copper hexamethyldisilazide

0-0-0

4,5-dimethyl-1,3-diisopropyl-imidazol-2-ylidene copper hexamethyldisilazide

0-0-0

Abacus

695188-31-9

Bis(N,N'-di-sec-butylacetamidinato)dicopper(I), copper(I)-N,N'-di-sec-butylacetamidinate

0-0-0

copper(I)-N,N'-diisopropylacetamidinate, (Cu(amd))

13395-16-9

copper(II) acetylacetonate, bis(2,4-pentanedionato) copper(II), cupric acetylacetonate, Cu(acac)₂

155640-85-0

copper(II) hexafluoroacetylacetonate, Cu(HFAC)₂

0-0-0

CTA-1, Adeka Corporation Proprietary Cu(II)-aminoalkoxide

14040-05-2

Cu(TMHD)₂, Cu(THD)₂, bis(2,2,6,6-tetramethyl-3,5-heptanedionate) copper, Copper(II) dipivaloylmethanate

0-0-0

Cuprum

872130-16-0

MABOC, bis(1-dimethylamino-2-methyl-2-butoxy) copper(II), Cu(dmamb)₂

Dy

0-0-0

bis-isopropylcyclopentadienyl-diisopropyl-acetamidinate-dysprosium (Dy(ⁱPrCp)₂(N-ⁱPr-amd))

Er

0-0-0

Bis-methylcyclopentadienyl-diisopropylacetamidinate-erbium, (Er(MeCp)₂(N-ⁱPr-amd))

35733-23-4

Er(TMHD)₃, Er(THD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) erbium, Erbium dipivaloylmethanate

F

62778-11-4

Hydrogen fluoride pyridine complex

2551-62-4

SF₆, Sulfur Hexafluoride

Fe

635680-56-7

Bis(N,N'-di-t-butylacetamidinato)iron(II)

14876-47-2

Fe(TMHD)₃, Fe(THD)₃, tris(2,2,6,6-tetramethyl- 3,5-heptanedionato) iron, Iron(III) dipivaloylmethanate

620945-29-1

Iron(III) t-butoxide, [Fe(OtBu)₃]₂

1316-98-9

t-Butylferrocene, (TBF), (t-BuCp)₂Fe

Ga

0-0-0

[(CH₃)₂GaNH₂]₃

57731-40-5

Bis(µ-dimethylamino) tetrakis(dimethylamino) digallium

34228-15-4

Ga(TMHD)₃, Ga(THD)₃, tris(2,2,6,6-tetramethyl- 3,5-heptanedionato) gallium, Gallium tetramethylheptanedionate

0-0-0

Me₅C_pGa, Pentamethylcyclopentadienyl Gallium

1115-99-7

TEG, triethyl galium, GaEt₃

1445-79-0

TMG, trimethyl galium, GaMe₃

Gd

126970-21-6

Gd(i-PrCp)₃

1272-21-5

Tris(cyclopentadienyl)gadolinium, Gd(C_p)₃

39470-11-6

tris(methylcyclopentadienyl)gadolinium Gd(MeCp)₃

Ge

1449-64-5

DMG, Dimethylgermane, Me₂GeH₂

0-0-0

Ge(Si(N(CH₃)₂)₂)₄

7344-40-3

TDMAGe, (Me₂N)₄Ge, [(CH₃)₂N]₄Ge, Tetrakis(DiMethylAmido) Germanium, Germanium Dimethylamide

0-0-0

TetraIsoButyl Germanium, TIBGe, Ge(i-C₄H₉)₄

Hf

0-0-0

(CpMe)₂HfOMeMe

78205-93-3

Bis(ethylcyclopentadienyl)hafnium(IV) dichloride, Hf(C₂H₅C₅H₄)₂Cl₂, Hf(EtCp)₂Cl₂

0-0-0

Hafnium 3-methyl-3-pentoxide, Hf(mp)₄

13499-05-3

Hafnium Tetrachloride, HfCl₄

0-0-0

Hf{η²-((EtN)(tBuN))CNEt₂}(NEt₂)₃

0-0-0

Hf{η²-((EtN)(tBuN))CNEtMe}(NEtMe)₃

0-0-0

Hf{η²-(ⁱPrN)₂CNEt₂}(NEt₂)₃

0-0-0

Hf{η²-(ⁱPrN)₂CNEtMe}(NEtMe)₃

2172-02-3

HfTB, Hf[OC(Me)₃]₄, Hf[OC(CH₃)₃]₄, Hafnium tetra-tert-butoxide

19824-55-6

TDEAHf, (Et₂N)₄Hf, [(C₂H₅)₂N]₄Hf, Tetrakis(DiEthylAmido) Hafnium, Hafnium Diethylamide

19962-11-9

TDMAHf, tetrakis(dimethylamido)hafnium, hafnium dimethylamide, (Me₂N)₄Hf, also CAS# 19782-68-4

352535-01-4

TEMAHf, tetrakis(ethylmethylamido) Hafnium, hafnium ethylmethylamide, (EtMeN)₄Hf

941596-80-1

Tris(dimethylamido)cyclopentadienyl Hafnium, HfCp(NMe₂)₃, Air Liquide HyALD^TM

Hf, Si

0-0-0

Bis(dimethylamino) [(methylaminodimethylsilyl) methylcyclopentadienyl] hafnium(IV), (DNSHf, Hf[η⁵:η¹-Cp(CH₂ ) (SiMe₂)NMe](NMe₂)₂

In

34822-89-4

Cyclopentadienylindium(I), InC_p

120441-92-1

DADI, [Me₂N(CH₂)₃]Me₂In, (3-(dimethylamino)propyl)dimethylindium

0-0-0

DATI, (dimethylbutylamino) trimethylindium

0-0-0

dimethyl(N-ethoxy-2,2-dimethylcarboxylicpropanamide)indium (Me₂In(EDPA))

0-0-0

Et₂InN(SiMe₃)₂, Et₂In(HMDS), DiEthyl Indium HexaMethylDiSilazane, DiEthyl Indium Bis(trimethylsilyl)amine, Bis(trimethysilyl)amidodiethyl Indium

14405-45-9

In(acac)₃, Indium(III) acetylacetonate

3385-78-2

In(CH₃)₃, InMe₃, TriMethyl Indium, TMI

34269-03-9

In(TMHD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) indium

0-0-0

InEtC_p, Indium Ethyl Cyclopentadienyl

0-0-0

Tris(1,3-diisopropyltriazenide) indium(III)

0-0-0

tris(N,N-dimethyl-N',N''-diisoproprylguanidinato)indium(III)

0-0-0

tris(N,N'-diisopropylamidinato)indium(III)

0-0-0

tris(N,N'-diisopropylformamidinato)indium(III)

Ir

721427-58-3

(Ethyl Cyclopentadienyl) (CycloHexaDiene) Iridium, Ir(EtCp)(CHD)

0-0-0

(ethylcyclopentadienyl) (1, 5-cyclooctodiene) Iridium, Ir(EtCp)(COD)

15635-87-7

Ir(acac)₃, Iridium acetylacetonate, Iridium pentanedione

La

404009-15-0

La(EtC_p)₃, tris(ethylcyclopentadienyl) lanthanum

14319-13-2

La(TMHD)₃, La(THD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) lanthanum, Lanthanum dipivaloylmethanate

1272-23-7

LaCp₃, Tris(cyclopentadienyl) lanthanum

175923-07-6

tris(bis[trimethylsilyl]amido) lanthanum, La[N(TMS)₂]₃

68959-87-5

tris(isopropylcyclopentadienyl)lanthanum, (i-PrCp)₃La

Li

4039-32-1

LiHMDS, Lithium hexamethyldisilazide, Lithium bis(trimethylsilyl)amide, LiN(SiMe₃)₂

1907-33-1

LiOt-Bu, LiOtBu, LTB, Lithium tert-butoxide, Lithium tertiary butoxide, LiOC₄H₉

Mg

1284-72-6

bis(cyclopentadienyl)Magnesium, MgCp₂

114460-02-5

Bis(ethylcyclopentadienyl)magnesium, (EtCp)₂Mg

Mn

0-0-0

[bis(1,4-di-isopropyl-1,3-diazabutadienyl)Mn(II)]

101923-26-6

Bis(ethylcyclopentadienyl)manganese

14324-99-3

Mn(TMHD)₃, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese

Mo

923956-62-1

Bis(t-butylimido)bis(dimethylamino)molybdenum

0-0-0

Mo(N^tBu)₂(S^tBu)₂

13939-06-5

Molybdenum hexacarbonyl, Mo(CO)₆

10241-05-1

Molybdenum(V) chloride, [MoCl₅]₂

N

7727-37-9

N₂, Nitrogen

302-01-2

N₂H₄, Hydrazine

7664-41-7

NH₃, Ammonia

Na

865-48-5

NaOtBu, Sodium tert-butoxide

Nb

864150-47-0

Nb(N-^tBu)(NMeEt)₃, TBTMEN

10026-12-7

NbCl₅, Niobium(V) chloride, Niobium pentachloride

3236-82-6

Niobium Ethoxide, Nb(OC₂H₅)₅, Nb(OEt)₅

7783-68-8

Niobium Pentafluoride, Niobium(V) fluoride, NbF₅

0-0-0

t-Amylimidotris(dimethylamido)niobium, (NtAm)(NMe₂)₃Nb

210363-27-2

TBTDEN, Tris(diethylamido)(tert-butylimido)niobium

Ni

1293-95-4

(MeCp)₂Ni, Ni(C₅H₄CH₃)₂, Bis(methylcyclopentadienyl)nickel(II), 1,1'-Dimethylnickelocene

0-0-0

Bis(1,4-di-isopropyl-1,3-diazabutadienyl)nickel, Ni(iPr-DAD)₂

1271-28-9

Bis(cyclopentadienyl)nickel, Nickelocene, Cp₂Ni

31886-51-8

Bis(ethylcyclopentadienyl)nickel, (EtCp)₂Ni

0-0-0

bis(isopropoxidedimethylamido)nickel, Ni(Oi-PrN(CH₃)₂)₂

942311-35-5

MABONi, Ni(dmamb)₂, bis(dimethylamino-2-methyl-2-butoxo)nickel

0-0-0

Ni(dpdab)₂, bis(1,4- diisopropyl- 1,4-diazabutadiene) nickel

3264-82-2

Nickel (II) acetylacetonate, anhydrous

940895-79-4

Nickel bis(N,N'-ditertialbutylacetamidinate), Dow Chemical AccuDEP^TM Nickel

O

630-08-0

Carbon Monoxide, CO

124-38-9

CO₂, Carbon Dioxide

7789-20-0

Deuterated Water, Deuterium Oxide, D₂O

7732-18-5

H₂O, Water

7722-84-1

Hydrogen Peroxide, H₂O₂

10024-97-2

N₂O, Nitrous Oxide

7782-44-7

O₂, Oxygen

10028-15-6

O₃, Ozone

P

1608-26-0

3DMAP, Tris(DiMethylAmido)Phosphine, (Me₂N)₃P

1068-21-9

DEPA, diethylphosphoramidate

7803-51-2

PH₃, Phospine, Phosphane

512-56-1

Trimethyl phosphate, TMP, (MeO)₃PO

Pd

64916-48-9

palladium(II) hexafluoroacetylacetonate, Pd(hfac)₂

Pt

94442-22-5

(Trimethyl)methylcyclopentadienylplatinum, MeCpMe₃Pt

Ru

0-0-0

(2,4-dimethylpentadienyl) (ethylcyclopentadienyl) ruthenium [Ru(DMPD)(EtCp)]

0-0-0

(ethylbenzene) (1,3-cyclohexadiene) Ru(0), EBCHDRu

0-0-0

(ethylbenzyl) (1-ethyl-1,4-cyclohexadienyl) Ru(0), EBECHRu

1287-13-4

Bis(cyclopentadienyl)ruthenium, Ruthenocene, Cp₂Ru, (C₅H₅)₂Ru

32992-96-4

Bis(EthylCycloPentadienyl)Ruthenium, Ru(EtCp)₂

0-0-0

Cyclopentadienyl ethyl (dicarbonyl) Ruthenium, C_pRu(CO)₂Et

0-0-0

dicarbonyl-bis(5-methyl-2,4-hexanediketonato) Ru(II) (C₁₆H₂₂O₆Ru)

0-0-0

Ethylcyclopentadienyl pyrrolyl ruthenium

0-0-0

Ethylmethylruthenocene

0-0-0

Isopropylmethylbenzene Cyclohexadiene Ruthenium, IMBCHRu

0-0-0

Methylcyclopentadienyl pyrrolyl ruthenium

20427-56-9

RuO₄, ruthenium tetroxide, Air Liquide ToRuS^TM

0-0-0

η⁴-2,3-dimethylbutadiene ruthenium tricarbonyl, Ru(DMBD)(CO)₃

S

7783-06-4

H₂S, Hydrogen Sulfide

Sb

0-0-0

Sb(cyclo-NC₂H₄)₃, Tris(aziridinyl) antimony (III)

0-0-0

Sb(N(Si(CH₃)₃)₂)₃

594-10-5

TMSb, trimethyl antimony, SbMe₃

7289-92-1

Tris(DiMethylAmido)Antimony, Sb[(CH₃)₂N]₃, TDMASb

Sc

2845240-61-9

(EtCp)₂ScCl, Bis(ethylcyclopentadienyl)scandium chloride

0-0-0

ASGARD, (EtCp)₂Sc(dbt)

Si

5505-72-6

1,3,5-Trimethyl- 1,3,5-trivinylcyclotrisilazane

15112-89-7

3DMASi, (Me₂N)₃SiH, [(CH₃)₂N]₃SiH, Tris(DiMethylAmido) Silane

1624-01-7

4DMASi, TDMASi, (Me₂N)₄Si, [(CH₃)₂N]₄Si, Tetrakis(DiMethylAmido) Silane, Silicon Dimethylamide

0-0-0

AP-LTO 330

27804-64-4

BDEAS, SAM-24, Bis(diethylamino)silane, (Et₂N)₂SiH₂

151625-26-2

BDIPADS, 1,2-Bis(diisopropylamino)disilane

0-0-0

Bis(DiMethylAmido)Silane, (Me₂N)₂SiH₂, BDMAS

0-0-0

Bis(dimethylaminomethylsilyl)(trimethylsilyl)amine, Me₃SiN(SiHMeNMe₂)₂, (CH₃)₃SiN(SiH(CH₃)N(CH₃)₂)₂

1011514-41-2

Bis(EthylMethylAmino)Silane, BEMAS, (EtMeN)₂SiH₂

186598-40-3

BTBAS, bis(tert-butylamido) silane, (t-BuCNH)₂SiH₂

0-0-0

CSN-2, 1,3-di-isopropylamino -2,4-dimethylcyclosilazane

4109-96-0

DCS, H₂SiCl₂, DiChloroSilane

908831-34-5

Di(isopropylamino)Silane, (i-PrHN)₂SiH₂, DIPAS

0-0-0

di(sec-butylamino)silane (DSBAS), ((s-Bu)₂N)SiH₃

0-0-0

Diaminosilane, SiH₂(NH₂)₂

13760-02-6

Diiodosilane, H₂I₂Si

1112-39-6

DiMethoxyDiMethylSilane DMDMS, (CH₃)₂(OCH₃)₂Si

1590-87-0

Disilane, Si₂H₆

75-78-5

DMDCS, Dimethyldichlorosilane, Si(CH₃)₂Cl₂

13465-77-5

Hexachlorodisilane, Si2Cl6

13465-78-6

MCS, MonoChloroSilane, H₃ClSi

0-0-0

N,N'-tert-butyl-1,1-dimethylethylenediamine silylene

15947-57-6

Neopentasilane, (SiH₃)₄Si, NPS

556-67-2

OMCTS, (CH₃)₂SiO-)₄, OctaMethylCycloTetraSiloxane

10026-04-7

SiCl₄, Silicon Tetrachloride

7803-62-5

SiH₄, Silane

2273763-87-2

TADS, 1,1,1-tris(dimethylamino)disilane, [(H₃C)₂N]₃Si₂H₃

0-0-0

TEASi, Tetrakis(EthylAmido)Silane, (EtHN)₄Si

78-10-4

TEOS, Si(OC₂H₅)₄, TetraEthyl OrthoSilicate

0-0-0

TIPAS, 3IPAS, ((CH₃)₂CHN)₃SiH, Tris(IsoPropyl)AminoSilane

993-07-7

TMS, trimethylsilane, Me₃SiH

6485-79-6

Triisopropylsilane, TIPS

13307-05-6

Tris(dimethylamino)chlorosilane, 3DMASiCl

0-0-0

Tris(EthylMethylAmido)Silane, 3EMAS

13862-16-3

Trisilylamine [N(SiH₃)₃]

Sn

1067-33-0

DiButylTinDiAcetate, DBTDA, ((CH₃CO₂)₂Sn[(CH₂)₃CH₃]₂)

0-0-0

Sn(dmamp)₂, bis(1-dimethylamino-2-methyl-2-propoxide)Sn

7393-43-3

TASn, TetraAllylTin, (H₂C=CHCH₂)₂Sn

1066-77-9

TDMASn, (Me₂N)₄Sn, [(CH₃)₂N]₄Sn, Tetrakis(DiMethylAmido) Tin, Tin Dimethylamide

597-64-8

Tetraethyl Tin, Tetraethyltin, Et₄Sn, (CH₃CH₂)₄Sn, (C₂H₅)₄Sn

7646-78-8

Tin Tetrachloride, SnCl₄

36809-75-3

Tin(IV) t-butoxide, Sn(O^tBu)₄, Sn(OC₄H₉)₄

Sr

0-0-0

bis(cyclopentadienyl)strontium, SrCp₂

0-0-0

bis[1-(2-methoxyethoxy)-2,2,6,6-tetramethyl-3,5-heptanedionate], Sr(METHD)₂

0-0-0

Hyper-Sr, bis(tri-isopropylcyclopentadienyl)strontium with 1,2-demethoxy-ethane adduct, Sr(ⁱPr₃Cp)₂DME

36830-74-7

Sr(DPM)₂, Strontium(II) bis(2,2,6,6-tetramethyl-3,5-heptanedionate)

Sr, Ta

0-0-0

Sr(Ta(OEt)₅-dmae)₂

Sr, Ta

0-0-0

Sr[Ta(OC₂H₅)₅(OC₂H₄OCH₃)]₂

Ta

852212-55-6

(tert-butylimino)bis(diethylamino)cyclopentadienyltantalum

0-0-0

bis((2-(dimethylamino)ethyl)(methyl)amido)methyl(tert-butylimido)tantalum

0-0-0

Isopropylimido Tris(Ethylmethylamido) Tantalum

19824-59-0

PDMAT, (NMe₂)₅Ta, Pentakis (DiMethylAmido) Tantalum

629654-53-1

t-Amylimidotris(dimethylamido)tantalum(V), (NtAm)(NMe₂)₃Ta, TAIMATA

6074-84-6

Ta(OC₂H₅)₅, Ta(OEt)₅, Tantalum(V) ethoxide

7721-01-9

TaCl₅, Tantalum Pentachloride

7783-71-3

TaF₅, Tantalum Pentafluoride

169896-41-7

TBTDET, tert-butylimido tris(diethylamino)tantalum, Ta[NEt₂]₃[=N-t-Bu)₃]

69039-11-8

Tert-Butylimido,Tris(diMEthylamino)Tantalum, Ta[N(CH₃)₂]₃[=NC(CH₃)₃], TBTMET, TBTDMT

511292-99-2

Tert-Butylimido,Tris(EthylMethylamino)Tantalum, Ta[N(CH₃)(C₂H₅)]₃[=NC(CH₃)₃], TBTEMT

Te

83817-35-0

Di(Tert-Butyl)Telluride, Bu^t₂Te

51112-72-2

DIPTe, DiIsoPropylTelluride, Te(iPr)₂

77129-69-2

Te₂(n-C₄H₉)₂, Dibutyl ditelluride

Ti

0-0-0

Dimethylamine cyclopentadienyl titanium, (CpN)Ti(NMe₂)₂

0-0-0

methyl cyclopentadienyl tris(isopropoxide) titanium, Ti(C_pMe)(O-i-Pr)₃

123927-75-3

Pentamethyl cyclopentadienyl titanium trimethoxide Ti(CpMe₅)(OMe)₃

4419-47-0

TDEATi, (Et₂N)₄Ti, [(C₂H₅)₂N]₄Ti, Tetrakis(DiEthylAmido) Titanium, Titanium Diethylamide

3275-24-9

TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me₂N)₄Ti

308103-54-0

TEMATi, (EtMeN)₄Ti, [(C₂H₅)(CH₃)N]₄Ti, Tetrakis(EthylMethylAmido) Titanium, Titanium Ethylmethylamide

36945-13-8

Tetrakis (neopentyl) Titanium, ((CH₃)₃CCH₂)₄Ti

0-0-0

Ti(C_p^Me)(NMe₂)₃, Tris(dimethylamido)methylcyclopentadienyl titanium

0-0-0

Ti(NMe₂)₃(guan), tris(dimethylamido) (N,N' diisopropyl-2-dimethylamidoguanidinato) titanium

7550-45-0

TiCl₄, Titanium Tetrachloride

3087-36-3

Titanium ethoxide, Ti(OEt)₄

3087-39-6

Titanium tert-butoxide, Ti(O^tBu)₄

992-92-7

Titanium(IV) methoxide, Ti(OMe)₄

0-0-0

tris(dimethylamido)-(dimethylamino-2-propanolato)titanium(IV) (TDMADT)

546-68-9

TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)₄

V

19824-56-7

TDMAV, (Me₂N)₄V, [(CH₃)₂N]₄V, Tetrakis(DiMethylAmido) Vanadium, Vanadium Dimethylamide

791114-66-4

TEMAV, (EtMeN)₄V, [(C₂H₅)(CH₃)N]₄V, Tetrakis(EthylMethylAmido) Vanadium, Vanadium Ethylmethylamide

3153-26-2

VO(acac)₂, VO(pd)₂, Vanadyl acetylacetonate, oxobis(2,4-pentanedionato)vanadium(IV)

5588-84-1

VTIP, vanadium (V) tri-i-propoxy oxide, VO(O-i-Pr)₃

W

0-0-0

(^MeC_p)W(CO)₂(NO), methylcyclopentadienyl dicarbonyl nitrosyl tungsten

64561-25-7

Bis(isopropyl cyclopentadienyl) tungsten(IV) dihydride, WH₂(iPrCp)₂

0-0-0

bis(tert-butylimido)bis(bis(trimethylsilylamido))tungsten(VI), [W(N^tBu)₂{N(SiMe₃)₂}₂]

406462-43-9

BTBMW, TBIDMW, bis(t-Butylimido) bis(DiMethylamido) Tungsten

0-0-0

HEtCpW(CO)₃, ethylcyclopentadienyl tungsten tricarbonyl

0-0-0

n5-ethylcyclopentadienyl-dicarbonyl nitrosyl- tungsten

12131-66-7

tris(3-hexyne)tungsten(0) carbonyl

14040-11-0

W(CO)₆, tungsten hexacarbonyl, Joppa27^TM (Entegris)

13283-01-7

WCl₆, Tungsten Hexachloride

7783-82-6

WF₆, Tungsten Hexafluoride

Y

15632-39-0

tris(2,2,6,6-tetramethyl-3,5-heptanedionato) yttrium Y(tmhd)₃

329735-72-0

Tris(methylcyclopentadienyl)yttrium(III), (MeCp)₃Y

130206-63-2

Y(ⁱPrC_p)₃, Yttrium tris(isopropylcyclopentadienyl)

Zn

557-20-0

DEZ, diethyl zinc, ZnEt₂

544-97-8

DMZ, DiMethylZinc, ZnMe₂, Zn(CH₃)₂

0-0-0

Zn(DMP)₂, BDMPZ, bis-3-(N,N-dimethylamino)propyl zinc

Zr

13801-49-5

TDEAZr, tetrakis(diethylamido)zirconium, zirconium diethylamide, (Et₂N)₄Zr

19756-04-8

TDMAZr, (Me₂N)₄Zr, [(CH₃)₂N]₄Zr, Tetrakis(DiMethylAmido) Zirconium, Zirconium Dimethylamide

175923-04-3

TEMAZr, (EtMeN)₄Zr, [(C₂H₅)(CH₃)N]₄Zr, Tetrakis(EthylMethylAmido) Zirconium, Zirconium Ethylmethylamide

33271-88-4

Tris(dimethylamino)cyclopentadienyl Zirconium, CpZr(NMe₂)₃, Air Liquide ZyALD^TM

916597-01-8

ZrCMMM, (MeC_p)₂Zr(OMe)(Me), Bis(methyl-η5-cyclopentadienyl)methoxymethyl zirconium

2081-12-1

ZrTB, Zr[OC(Me)₃]₄, Zr[OC(CH₃)₃]₄, Zirconium tetra-tert-butoxide

About Plasma ALD, LLC

Precursors and Gases in the Plasma Enhanced Atomic Layer Deposition Publication Database

-

Ag

Al

As

Au

B

Ba

Be

Bi

C

Ce

Co

Cr

Cu

Dy

Er

F

Fe

Ga

Gd

Ge

Hf

Hf, Si

In

Ir

La

Li

Mg

Mn

Mo

N

Na

Nb

Ni

O

P

Pd

Pt

Ru

S

Sb

Sc

Si

Sn

Sr

Sr, Ta

Ta

Te

Ti

V

W

Y

Zn

Zr