Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Benzene, C6H6, CAS# 71-43-2

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 1 record(s).

NumberTitle
1Low-temperature remote plasma-enhanced atomic layer deposition of graphene and characterization of its atomic-level structure