LiHMDS, Lithium hexamethyldisilazide, Lithium bis(trimethylsilyl)amide, LiN(SiMe₃)₂, CAS# 4039-32-1

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s).

Number	Title
1	Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
2	Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries
3	Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries
4	Electrochemical Performance of Lithium-Nickel Oxide Thin Films Obtained with Use of Atomic Layer Deposition