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Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries

Type:
Journal
Info:
Energies 2020, 13(9), 2345
Date:
2020-05-04
DOI:
http://dx.doi.org/10.3390/en13092345

Author Information

Name Institution
Maxim Yu MaximovPeter the Great St.Petersburg Polytechnic University
Denis V. NazarovSaint-Petersburg Electrotechnical University
Aleksandr M. RumyantsevIoffe Institute
Yury KoshtyalPeter the Great St.Petersburg Polytechnic University
Ilya EzhovPeter the Great St.Petersburg Polytechnic University
Ilya MitrofanovPeter the Great St.Petersburg Polytechnic University
Artem KimPeter the Great St.Petersburg Polytechnic University
Oleg MedvedevPeter the Great St.Petersburg Polytechnic University
Anatoly A. PopovichPeter the Great St.Petersburg Polytechnic University

Films

Plasma LiNiOx

Hardware used: Picosun SUNALE R-150B
LiHMDS, Lithium hexamethyldisilazide, Lithium bis(trimethylsilyl)amide, LiN(SiMe3)2
CAS#: 4039-32-1
Bis(cyclopentadienyl)nickel, Nickelocene, Cp2Ni
CAS#: 1271-28-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Plasma NiOx

Hardware used: Picosun SUNALE R-150B
Bis(cyclopentadienyl)nickel, Nickelocene, Cp2Ni
CAS#: 1271-28-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Plasma Li2O

Hardware used: Picosun SUNALE R-150B
LiHMDS, Lithium hexamethyldisilazide, Lithium bis(trimethylsilyl)amide, LiN(SiMe3)2
CAS#: 4039-32-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Ellips-1891 SAG

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific ESCA LAB 250 XPS Spectrometer

Characteristic: Chemical Composition, Impurities
Analysis: TOF-SIMS, Time of Flight Secondary Ion Mass Spectrometry
Diagnostic: ION TOF TofSIMS 5

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Zeiss Merlin

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Zeiss Merlin

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: Zeiss Libra 200FE

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: Zeiss Libra 200FE

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Diagnostic: Zeiss Libra 200FE

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry
Diagnostic: Metrohm Autolab PGSTAT302

Characteristic: Charge Capacity
Analysis: Charge/Discharge Cycling
Diagnostic: Neware CT-3008W-5V10mA

Substrates

Si(100)
Stainless Steel 316L

Notes

1508