Picosun SUNALE R-150B Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Picosun SUNALE R-150B hardware returned 14 records.

Number	Title
1	A comparative study of AlN and Al₂O₃ based gate stacks grown by atomic layer deposition on InGaAs
2	Atomic Layer Deposition of NiO to Produce Active Material for Thin-Film Lithium-Ion Batteries
3	Atomic Layer Deposition of Lithium-Nickel-Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries
4	Synthesis and Characterization of Tin Oxide By Atomic Layer Deposition for Solid-State Batteries
5	Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries
6	Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
7	Tris(dimethylamido)aluminum(III): An overlooked atomic layer deposition precursor
8	Passivation of InGaAs interface states by thin AlN interface layers for metal-insulator-semiconductor applications
9	Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity
10	A comparison between HfO₂/Al₂O₃ nano-laminates and ternary Hf_xAl_yO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
11	Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
12	MANOS performance dependence on ALD Al₂O₃ oxidation source
13	Tribological properties of thin films made by atomic layer deposition sliding against silicon
14	Electrochemical Performance of Lithium-Nickel Oxide Thin Films Obtained with Use of Atomic Layer Deposition