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Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity

Type:
Journal
Info:
Nanomaterials 2021, 11, 907
Date:
2021-03-31
DOI:
http://dx.doi.org/10.3390/nano11040907

Author Information

Name Institution
Yury KoshtyalPeter the Great St.Petersburg Polytechnic University
Ilya MitrofanovPeter the Great St.Petersburg Polytechnic University
Denis V. NazarovPeter the Great St.Petersburg Polytechnic University
Oleg MedvedevPeter the Great St.Petersburg Polytechnic University
Artem KimPeter the Great St.Petersburg Polytechnic University
Ilya EzhovPeter the Great St.Petersburg Polytechnic University
Aleksandr M. RumyantsevPeter the Great St.Petersburg Polytechnic University
Anatoly A. PopovichPeter the Great St.Petersburg Polytechnic University
Maxim Yu MaximovPeter the Great St.Petersburg Polytechnic University

Films

Plasma NiCoO

Hardware used: Picosun SUNALE R-150B
Bis(cyclopentadienyl)nickel, Nickelocene, Cp2Ni
CAS#: 1271-28-9
cobaltacene, bis(cyclopentadienyl)cobalt, Cp2Co
CAS#: 1277-43-6
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Plasma NiOx

Hardware used: Picosun SUNALE R-150B
Bis(cyclopentadienyl)nickel, Nickelocene, Cp2Ni
CAS#: 1271-28-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Plasma CoOx

Hardware used: Picosun SUNALE R-150B
cobaltacene, bis(cyclopentadienyl)cobalt, Cp2Co
CAS#: 1277-43-6
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 300C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Ellips-1891 SAG

Characteristic: Uniformity
Analysis: Ellipsometry
Diagnostic: Ellips-1891 SAG

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Discover

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: VG Scientific ESCALAB 250

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Zeiss Supra 55

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: Zeiss Supra 55

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry
Diagnostic: Metrohm Autolab PGSTAT302

Substrates

Si(100)
Stainless Steel 316L

Notes

1602