Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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cobaltacene, bis(cyclopentadienyl)cobalt, Cp2Co, CAS# 1277-43-6

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 32 record(s).

NumberTitle
1Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
2Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
3Self-formation of dielectric layer containing CoSi2 nanocrystals by plasma-enhanced atomic layer deposition
4Atomic layer deposition of cobalt phosphate from cobaltocene, trimethylphosphate, and O2 plasma
5Co/CoP Nanoparticles Encapsulated Within N, P-Doped Carbon Nanotubes on Nanoporous Metal-Organic Framework Nanosheets for Oxygen Reduction and Oxygen Evolution Reactions
6Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction
7Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth
8Synthesis of single-walled carbon nanotubes from atomic-layer-deposited Co3O4 and Co3O4/Fe2O3 catalyst films
9Efficient and Sustained Photoelectrochemical Water Oxidation by Cobalt Oxide/Silicon Photoanodes with Nanotextured Interfaces
10Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
11Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
12Spontaneous Formation of Vertical Magnetic-Metal-Nanorod Arrays During Plasma-Enhanced Atomic Layer Deposition
13Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NHx radical formation
14Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant
15Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co
16Characterization of Ultrathin PEALD-Grown RuCo Films for Diffusion Barrier and Copper Direct-Plate Applications
17Co3O4 as Anode Material for Thin Film µBatteries prepared by Remote Plasma Atomic Layer Deposition
18Atomic Layer Deposition of Cobalt Using H2-, N2-, and NH3-Based Plasmas: On the Role of the Co-reactant
19Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity
20High-Quality Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
21Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
22Plasma-enhanced atomic layer deposition of Co on metal surfaces
23Remote Plasma Atomic Layer Deposition of Thin Films of Electrochemically Active LiCoO2
24Emerging Atomic Layer Deposition (ALD) Processes For Low Thermal Budget Flexible Electronics
25Understanding the Oxygen Evolution Reaction Mechanism on CoOx using Operando Ambient-Pressure X-ray Photoelectron Spectroscopy
26Reaction Mechanism of the Metal Precursor Pulse in Plasma-Enhanced Atomic Layer Deposition of Cobalt and the Role of Surface Facets
27Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
28Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer
29High-Quality Cobalt Thin Films by Plasma-Enhanced Atomic Layer Deposition
30A multifunctional biphasic water splitting catalyst tailored for integration with high-performance semiconductor photoanodes
31Atomic Layer Deposition of Ni-Co-O Thin-Film Electrodes for Solid-State LIBs and the Influence of Chemical Composition on Overcapacity
32Atomic layer deposition of cobalt phosphate thin films for the oxygen evolution reaction