Plasma ALD introduction from the original home page

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Final version of the plasma enhanced atomic layer deposition database.

The publication database has 1749 entries covering:

• 219 Films
• 293 Precursors
• 81 Dep Hardware Sets
• 258 Characteristics
• 5415 Authors

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Year in Review archive 2021 2022 2023 2024

ALD Links

Plasma Enhanced ALD Theses