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Authors in the Plasma Enhanced Atomic Layer Deposition Publication Database

The plasma enhanced atomic deposition layer community is a diverse group of scientists and engineers from academia, industry, and governmental institutions looking for new and exciting materials and applications for those materials. Without their constant hard work pushing the boundaries of PEALD knowledge, the discipline would not be expanding as quickly as it has.


This list of authors got too big so I split them up on multiple pages. Select a subset from the list below.



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Mark Sowa

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