Alan Blake Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Alan Blake returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Low sheet resistance titanium nitride films by low-temperature plasma-enhanced atomic layer deposition using design of experiments methodology
2High aspect ratio iridescent three-dimensional metal-insulator-metal capacitors using atomic layer deposition