R. Seguin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. Seguin returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon
2Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition