Calder Sheagren Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Calder Sheagren returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires |
2 | Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators |