The publication database currently has 1673 entries.
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Recent Database Additions
Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors
Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution
Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries
Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition
Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
Film Materials in the Plasma Enhanced Atomic Layer Deposition Publication Database
A wide variety of films have been deposited using plasma enhanced atomic layer deposition including oxides, nitrides, and metals. Below is a table which lists all the films which have been discussed in the publications included in the plasma-ald.com database. Click on the film chemical formula to get a list of publications discussing that material.