2022 Year in Review

February 2023 Stats


The publication database currently has 1673 entries.
204 Films
279 Precursors
78 Dep Hardware Sets
253 Characteristics
91 Theses
5136 Authors

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2021 Year in Review
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Recent Database Additions
Characterization of thin Al2O3/SiO2 dielectric stack for CMOS transistors Designing Multifunctional Cobalt Oxide Layers for Efficient and Stable Electrochemical Oxygen Evolution Hierarchical Atomic Layer Deposited V2O5 on 3D Printed Nanocarbon Electrodes for High-Performance Aqueous Zinc-Ion Batteries Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes

Film Materials in the Plasma Enhanced Atomic Layer Deposition Publication Database

A wide variety of films have been deposited using plasma enhanced atomic layer deposition including oxides, nitrides, and metals. Below is a table which lists all the films which have been discussed in the publications included in the plasma-ald.com database. Click on the film chemical formula to get a list of publications discussing that material.

Ag

Al

Al:BaTiO3

Al:WO3

Al:ZnO

Al2O3

AlxGa1-xN

AlF

AlInN

AlMgO

AlN

AlOF

AlON

AlPxOy

AlS

AlSixOy

AlSrTiO

AlTixOy

Alucone

Au

B:SiO2

B2O3

BaO

BaTiO3

BeO

BGaN

Bi2O3

BiFeO3

BInN

BN

C

CeO2

Co

Co3(PO4)2

CoC

CoFe2O4

CoN

CoOx

CoP

Cr

Cr2O3

Cu

Cu-Mn

Cu3N

CuOx

Did Not Work

Dy2O3

Er:Al2O3

Er:Y2O3

Er2O3

Fe

Fe2O3

FePO4

FeSnO

Ga:ZnO

Ga2O3

GaAs

GaN

GaP

GaS

GaTiOx

Gd2O3

GdN

Ge

GeSbTe

GeZrO2

Graphene

H:ZnO

Hf

HfAlOx

HfLaOx

HfNx

HfO2

HfOF

HfON

HfSiOx

HfSiON

HfTiN

HfZrO2

HfZrSiO

IGZO

In2(S,O)3

In2O3

In2S3

InGaN

InN

InZnO

Ir

IrO2

La2O3

Li2CO3

Li2O

Li3PO4

LiCoO2

LiF

LiMnO

LiNiOx

LiOH

LiPON

MgxZn1-xO

MgO

MgZnO:(N:Ga)

Mn

MnOx

Mo

MoCN

MoN

MoOx

MoS2

MoWO

Nb

Nb2O5

NbN

NbTiN

Ni

NiCoO

NiFe

NiOx

NiTaN

Pd

Plasma Study

POx

Precursor Characterization

Pt

PtO2

Ru

Ru-WCN

RuC

RuCo

RuNx

RuO2

RuSiN

RuTa

RuTaN

RuTiN

Sb

Sb2O5

Sb2Te3

Si

Si:GaP

SiAlN

SiC

SiCxNy

SiCOH

SiNx

SiO2

SiON

SiSnOx

Sn:TiO2

SnN

SnO2

SnON

SrBi2Ta2O9

SrO

SrTa2O6

SrTiO3

Ta

Ta2O5

TaCx

TaCN

TaNx

TaNbOx

TaON

TaZrO2

Te

Ti

TiAlCN

TiAlN

TiC

TiCN

TiMoN

TiN

TiO2

TiON

TiP2O7

TiSiN

TiSiO

TiTaO

TiVN

VMoO2

VN

VOx

VPO4

W

WC

WCN

WN

WO3

WS2

WSiN

Y2O3

YMnO3

YSZ

Zircone

ZnO

ZnO:(N:Ga)

ZnON

ZnPO4

ZnS

ZnSnO

ZrN

ZrO2

ZrON

ZrTiN


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