The publication database currently has 1652 entries.
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Recent Database Additions
Optical in situ monitoring of plasma-enhanced atomic layer deposition process
The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
The Applications of Ultra-Thin Nanofilm for Aerospace Advanced Manufacturing Technology
Texture of atomic layer deposited ruthenium
Comparative study of structural electrical dielectric and ferroelectric properties of HfO2 deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET
Film Materials in the Plasma Enhanced Atomic Layer Deposition Publication Database
A wide variety of films have been deposited using plasma enhanced atomic layer deposition including oxides, nitrides, and metals. Below is a table which lists all the films which have been discussed in the publications included in the plasma-ald.com database. Click on the film chemical formula to get a list of publications discussing that material.