A wide variety of films have been deposited using plasma enhanced atomic layer deposition including oxides, nitrides, and metals. Below is a table which lists all the films which have been discussed in the publications included in the plasma-ald.com database. Click on the film chemical formula to get a list of publications discussing that material.
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: firstname.lastname@example.org
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