Your search for plasma enhanced atomic layer deposition publications discussing Si films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Atomic layer epitaxy of Si on Ge(100) using Si2Cl6 and atomic hydrogen |
| 2 | Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon |
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