Si Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Si films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer epitaxy of Si on Ge(100) using Si2Cl6 and atomic hydrogen
2Atomic layer epitaxy of Si using atomic H
3Electron-enhanced atomic layer deposition of silicon thin films at room temperature
4Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon
5Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment