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Multifactor Search of the Plasma Enhanced Atomic Layer Deposition Publication Database

The relevant plasma atomic layer deposition literature is spread out over the last 20 years in numerous journals and conference proceedings. Here is provided an easy interface to quickly search for journal articles and other types of scientific publications relevant to your plasma ALD research needs.

We have prescreened plasma ALD references, according to 9 categories, to help you quickly find the information you need. Use the drop down selector boxes for each category to specify one or more categories. After you have set the drop down boxes, press the "Submit" button to retreive the results.

Overspecifying the search may not return any results. Start with a single search term and if you get too many matches, return to this page and specify another category to narrow the results.

The database currently has 1150 items.

Film Composition and Substrates

Process Chemistries and Hardware

Authors and Affiliations

Film and Plasma Characteristics, Analyses, and Diagnostics

Temperature Range



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