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An economical, compact inductively coupled plasma source.

Ideal for:
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  • Surface cleaning
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MoOx Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing MoOx films returned 14 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer
2Thickness and Morphology Dependent Electrical Properties of ALD-Synthesized MoS2 FETs
3Low-temperature atomic layer deposition of MoOx for silicon heterojunction solar cells
4Atomic layer deposition of molybdenum oxide from (NtBu)2(NMe2)2Mo and O2 plasma
5Atomic Layer Deposition of V1-xMoxO2 Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation
6Molybdenum Disulfide Catalytic Coatings via Atomic Layer Deposition for Solar Hydrogen Production from Copper Gallium Diselenide Photocathodes
7Process Control of Atomic Layer Deposition Molybdenum Oxide Nucleation and Sulfidation to Large-Area MoS2 Monolayers
8Large area, patterned growth of 2D MoS2 and lateral MoS2-WS2 heterostructures for nano- and opto-electronic applications
9The important role of water in growth of monolayer transition metal dichalcogenides
10Influence of plasma power on deposition mechanism and structural properties of MoOx thin films by plasma enhanced atomic layer deposition
11Plasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells
12On the Contact Optimization of ALD-Based MoS2 FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
13Characterization of Molybdenum Oxide Thin Films Grown by Atomic Layer Deposition
14Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges