Publication Information

Title:
Plasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells
Type:
Journal
Info:
Applied Physics A 2015, Volume 120, Issue 3, pp 811-816
Date:
2015-06-05

Author Information

Name Institution
Johannes ZieglerMartin Luther University
Mathias MewsHelmholtz-Zentrum Berlin für Materialien und Energie GmbH
Kai KaufmannFraunhofer Center for Silicon Photovoltaics CSP
Thomas SchneiderMartin Luther University
Alexander N. SprafkeMartin Luther University
Lars KorteHelmholtz-Zentrum Berlin für Materialien und Energie GmbH
Ralf B. WehrspohnMartin Luther University

Films

Plasma MoOx


Plasma MoOx


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Minority Carrier Lifetime
Analysis: Photoconductance

Characteristic: Electrical Properties
Analysis: Bright I-V

Substrates

Silicon

Keywords

Notes

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