Your search for plasma enhanced atomic layer deposition publications authored by Lars Korte returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||In-system photoelectron spectroscopy study of tin oxide layers produced from tetrakis(dimethylamino)tin by plasma enhanced atomic layer deposition|
|2||Plasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells|
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