Mathias Mews Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mathias Mews returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1In-system photoelectron spectroscopy study of tin oxide layers produced from tetrakis(dimethylamino)tin by plasma enhanced atomic layer deposition
2Plasma-enhanced atomic-layer-deposited MoOx emitters for silicon heterojunction solar cells


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