Plasma and Atomic Layer Deposition Consulting


Allow my extensive and diverse plasma and Atomic Layer Deposition (ALD) background help you rapidly achieve your application goals.


Based in Boston, MA, USA


Contact me at marksowa@plasma-ald.com.


  • 28 years thin film plasma processing experience
  • Focused on plasma-enhanced atomic layer deposition since 2008
  • Additional expertise:
    • Thermal ALD
    • Molecular Layer Deposition
    • Plasma surface treatments
    • Plasma etch


I have worked with hundreds of end users on the full spectrum of activities required for integration of ALD processes including:

  • Identification of best ALD materials for application
  • Deposition requirements
  • Hardware configuration
  • Demonstration coatings
  • Hardware install
  • Training
  • Process optimization
  • Process troubleshooting
  • Hardware troubleshooting