Publication Information

Title:
Atomic Layer Deposition of V1-xMoxO2 Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation
Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2018, 10 (7), pp 6601-6607
Date:
2018-01-30

Author Information

Name Institution
Xinrui LvChinese Academy of Sciences
Yunzhen CaoChinese Academy of Sciences
Lu YanChinese Academy of Sciences
Ying LiChinese Academy of Sciences
Yuzhi ZhangChinese Academy of Sciences
Lixin SongChinese Academy of Sciences

Films

Plasma MoOx




Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy

Substrates

Si(100)

Keywords

Notes

1206