Beneq TFS-500 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Beneq TFS-500 hardware returned 16 records.

Number	Title
1	Atomic Layer Deposition of V1-xMoxO2 Thin Films, Largely Enhanced Luminous Transmittance, Solar Modulation
2	Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
3	Breakdown and Protection of ALD Moisture Barrier Thin Films
4	Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition
5	Properties of AlN grown by plasma enhanced atomic layer deposition
6	Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
7	Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers
8	High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
9	GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
10	Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
11	Surface passivation of GaAs nanowires by the atomic layer deposition of AlN
12	Protective capping and surface passivation of III-V nanowires by atomic layer deposition
13	Silicon surface passivation with atomic layer deposited aluminum nitride
14	Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
15	Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
16	Plasma-Assisted Atomic Layer Deposition of Al2O3 at Room Temperature