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Breakdown and Protection of ALD Moisture Barrier Thin Films

Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2015, 7 (40), pp 22121-22127
Date:
2015-09-24
DOI:
http://dx.doi.org/10.1021/acsami.5b06891

Author Information

Name Institution
Frederik NehmTechnische Universität Dresden
Hannes KlumbiesTechnische Universität Dresden
Claudia RichterNaMLab gGmbH
Aarti SinghNaMLab gGmbH
Uwe SchroederNaMLab gGmbH
Thomas MikolajickNaMLab gGmbH
Tobias MönchTechnische Universität Dresden
Christoph HoßbachTechnische Universität Dresden
Matthias AlbertTechnische Universität Dresden
Johann W. BarthaTechnische Universität Dresden
Karl LeoTechnische Universität Dresden
Lars Müller-MeskampTechnische Universität Dresden

Films

Thermal Al2O3

Hardware used: Beneq TFS-500
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
O3, Ozone
CAS#: 10028-15-6
Deposition Temperature = 80C

Thermal TiO2

Hardware used: Beneq TFS-500
TiCl4, Titanium Tetrachloride
CAS#: 7550-45-0
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 80C

Thermal Alucone

Hardware used: Beneq TFS-500
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Ethylene glycol
CAS#: 107-21-1
Deposition Temperature = 80C

Thermal HfO2

Hardware used: Oxford Instruments OpAL
TEMAHf, tetrakis(ethylmethylamido) Hafnium, hafnium ethylmethylamide, (EtMeN)4Hf
CAS#: 352535-01-4
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 80C

Plasma SiO2

Hardware used: Oxford Instruments OpAL
BDEAS, SAM-24, Bis(diethylamino)silane, (Et2N)2SiH2
CAS#: 27804-64-4
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 80C

Plasma Al2O3

Hardware used: SENTECH
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 100C

Film/Plasma Properties

Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: Calcium Test
Diagnostic: Custom

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: AIST-NT Combiscope

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: -

Substrates

Glass
Calcium

Notes

396