Inductively coupled plasma sources from Plasma ALD, LLC.


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Claudia Richter Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Claudia Richter returned 3 record(s).

NumberTitle
1Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
2Breakdown and Protection of ALD Moisture Barrier Thin Films
3Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films