Inductively coupled plasma sources from Plasma ALD, LLC.


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Frederik Nehm Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Frederik Nehm returned 4 record(s).

NumberTitle
1Breakdown and Protection of ALD Moisture Barrier Thin Films
2Organic narrowband near-infrared photodetectors based on intermolecular charge-transfer absorption
3Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers
4Optical display film as flexible and light trapping substrate for organic photovoltaics