Uwe Schroeder Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Uwe Schroeder returned 3 record(s).

Number	Title
1	Breakdown and Protection of ALD Moisture Barrier Thin Films
2	Film properties of low temperature HfO2 grown with H2O, O3, or remote O2-plasma
3	Influence of oxygen source on the ferroelectric properties of ALD grown Hf1-xZrxO2 films