Matthias Albert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Matthias Albert returned 7 record(s).

Number	Title
1	Breakdown and Protection of ALD Moisture Barrier Thin Films
2	In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films
3	Direct plasma-enhanced atomic layer deposition of aluminum nitride for water permeation barriers
4	Comparison of PVD, PECVD & PEALD Ru(-C) films as Cu diffusion barriers by means of bias temperature stress measurements
5	High-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating
6	Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films
7	In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition