Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Lars Müller-Meskamp Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Lars Müller-Meskamp returned 3 record(s).

NumberTitle
1Optical display film as flexible and light trapping substrate for organic photovoltaics
2Breakdown and Protection of ALD Moisture Barrier Thin Films
3Flexible, light trapping substrates for organic photovoltaics