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Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films

Type:
Journal
Info:
J. Vac. Sci. Technol. A 36(5), Sep/Oct 2018
Date:
2018-07-06
DOI:
http://dx.doi.org/10.1116/1.5038856

Author Information

Name Institution
Perttu SippolaAalto University
Alexander Pyymaki PerrosAalto University
Oili M. E. YlivaaraVTT Technical Research Centre
Helena RonkainenVTT Technical Research Centre
Jaakko JulinUniversity of Jyväskylä
Xuwen LiuAalto University
Timo SajavaaraUniversity of Jyväskylä
Jarkko EtulaAalto University
Harri LipsanenAalto University
Riikka L. PuurunenAalto University

Films

Plasma AlN

Hardware used: Beneq TFS-500
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
NH3, Ammonia
CAS#: 7664-41-7
Deposition Temperature Range = 150-300C

Plasma AlN

Hardware used: Beneq TFS-500
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
N2, Nitrogen
CAS#: 7727-37-9
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 200C

Film/Plasma Properties

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Rigaku Smartlab

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Characteristic: Stress
Analysis: Wafer Curvature
Diagnostic: KLA-Tencor FLX 2320

Characteristic: Hardness
Analysis: Nanoindentation
Diagnostic: Hysitron TI-900 TriboIndenter

Characteristic: Elastic Modulus
Analysis: Nanoindentation
Diagnostic: Hysitron TI-900 TriboIndenter

Characteristic: Adhesion
Analysis: Scratch Testing
Diagnostic: Anton Paar MCT

Characteristic: Friction Coefficient
Analysis: Reciprocating Sliding Test
Diagnostic: Anton Paar MCT

Characteristic: Wear Rate
Analysis: Reciprocating Sliding Test
Diagnostic: Anton Paar MCT

Substrates

Si(100)

Notes

1215