Xuwen Liu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Xuwen Liu returned 3 record(s).

Number	Title
1	Thermal and plasma enhanced atomic layer deposition of SiO₂ using commercial silicon precursors
2	Tribological properties of thin films made by atomic layer deposition sliding against silicon
3	Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films