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Tribological properties of thin films made by atomic layer deposition sliding against silicon

Type:
Journal
Info:
J. Vac. Sci. Technol. A 36(1), Jan/Feb 2018
Date:
2017-11-28
DOI:
http://dx.doi.org/10.1116/1.5003729

Author Information

Name Institution
Lauri KilpiVTT Technical Research Centre
Oili M. E. YlivaaraVTT Technical Research Centre
Antti VaajokiVTT Technical Research Centre
Xuwen LiuAalto University
Ville RontuAalto University
Sakari SintonenAalto University
Eero HaimiAalto University
Jari MalmUniversity of Jyväskylä
Markus BosundBeneq Oy
Marko TuominenASM Microchemistry Oy
Timo SajavaaraUniversity of Jyväskylä
Harri LipsanenAalto University
Simo-Pekka HannulaAalto University
Riikka L. PuurunenAalto University
Helena RonkainenVTT Technical Research Centre

Films

Plasma TiN

Hardware used: Beneq TFS-200
TiCl4, Titanium Tetrachloride
CAS#: 7550-45-0
NH3, Ammonia
CAS#: 7664-41-7
Deposition Temperature = 300C

Thermal Al2O3

Hardware used: Picosun SUNALE R-150B
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
H2O, Water
CAS#: 7732-18-5
Deposition Temperature Range = 50-300C

Thermal TiO2

Hardware used: Picosun SUNALE R-150B
TiCl4, Titanium Tetrachloride
CAS#: 7550-45-0
H2O, Water
CAS#: 7732-18-5
Deposition Temperature Range = 110-300C

Thermal NbN

Hardware used: Picosun R200
NbCl5, Niobium(V) chloride, Niobium pentachloride
CAS#: 10026-12-7
NH3, Ammonia
CAS#: 7664-41-7
Deposition Temperature = 100C

Thermal TiAlCN

Hardware used: ASM EmerALD
TiCl4, Titanium Tetrachloride
CAS#: 7550-45-0
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
NH3, Ammonia
CAS#: 7664-41-7
Deposition Temperature = 100C

Film/Plasma Properties

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Xpert PRO MRD X-ray Diffractometer

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MRD X-ray Diffractometer

Characteristic: Hardness
Analysis: Nanoindentation
Diagnostic: Hysitron TI-900 TriboIndenter

Characteristic: Young's Modulus
Analysis: Nanoindentation
Diagnostic: Hysitron TI-900 TriboIndenter

Characteristic: Friction Coefficient
Analysis: Reciprocating Sliding Test
Diagnostic: Anton Paar MCT

Characteristic: Wear Rate
Analysis: Pin on Disc
Diagnostic: -

Substrates

Silicon

Notes

1140