Markus Bosund Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Markus Bosund returned 8 record(s).

Number	Title
1	Thermal and plasma enhanced atomic layer deposition of SiO₂ using commercial silicon precursors
2	Comparison of ammonia plasma and AlN passivation by plasma-enhanced atomic layer deposition
3	High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
4	GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
5	Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces
6	Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF₆ based plasmas
7	Properties of AlN grown by plasma enhanced atomic layer deposition
8	Tribological properties of thin films made by atomic layer deposition sliding against silicon