Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Sakari Sintonen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sakari Sintonen returned 3 record(s).

NumberTitle
1Tribological properties of thin films made by atomic layer deposition sliding against silicon
2Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
3Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition