NbCl5, Niobium(V) chloride, Niobium pentachloride, CAS# 10026-12-7
Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 2 record(s).
| Number | Title |
|---|---|
| 1 | Atomic Layer Deposition of Niobium Nitride from Different Precursors |
| 2 | Tribological properties of thin films made by atomic layer deposition sliding against silicon |