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Timo Sajavaara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Timo Sajavaara returned 19 record(s).

NumberTitle
1Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
2Properties of AlN grown by plasma enhanced atomic layer deposition
3Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis
4Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
5Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
6Tribological properties of thin films made by atomic layer deposition sliding against silicon
7Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
8Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
9Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films
10Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films
11Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
12Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
13A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films
14Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
15Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
16Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
17Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films
18Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
19The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges