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Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films

Type:
Journal
Info:
Chem. Mater., 2011, 23 (11), pp 2901–2907
Date:
2011-04-20
DOI:
http://dx.doi.org/10.1021/cm200402j

Author Information

Name Institution
Maarit I. KariniemiUniversity of Helsinki
Jaakko T. NiinistöUniversity of Helsinki
Timo T. HatanpääUniversity of Helsinki
Marianna KemellUniversity of Helsinki
Timo SajavaaraUniversity of Jyväskylä
Mikko K. RitalaUniversity of Helsinki
Markku A. LeskeläUniversity of Helsinki

Films

Plasma Ag

Hardware used: Beneq TFS-200
Ag(FOD)(PEt3), Triethylphosphine (6,6,7,7,8,8,8- heptafluoro-2,2- dimethyl-3,5- octanedionate) silver(I)
CAS#: 165461-74-5
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature Range = 120-150C

Film/Plasma Properties

Characteristic: Thickness
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: Oxford INCA 350 Energy Spectrometer

Characteristic: Thickness
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: Hitachi S-4800 Field Emission Scanning Electron Microscope

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi S-4800 Field Emission Scanning Electron Microscope

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Veeco Instruments Nanoscope V

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: Keithley 2400 Source Meter

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: Cascade Microtech Four-Point Probe

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Substrates

soda lime glass
Si(100)

Notes

Aeronex Gatekeeper gas purifier used
Entegris Gatekeeper gas purifier used
2