Mikko K. Ritala Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mikko K. Ritala returned 15 record(s).

Number	Title
1	MANOS performance dependence on ALD Al₂O₃ oxidation source
2	Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
3	Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
4	Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
5	Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors
6	Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
7	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
8	Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
9	Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
10	Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
11	Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
12	Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
13	Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
14	Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
15	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide