Mikko K. Ritala Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mikko K. Ritala returned 15 record(s).

Number	Title
1	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
2	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
3	Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
4	Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
5	Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
6	Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
7	Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
8	Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
9	MANOS performance dependence on ALD Al₂O₃ oxidation source
10	Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
11	Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
12	Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
13	Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
14	Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
15	Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors