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Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor

Type:
Journal
Info:
Chem. Mater., 2013, 25 (7), pp 1132-1138
Date:
2013-03-14
DOI:
http://dx.doi.org/10.1021/cm400215q

Author Information

Name Institution
Jason P. CoyleCarleton University
Gangotri DeyTyndall National Institute, University College Cork
Eric R. SirianniUniversity of Delaware
Marianna KemellUniversity of Helsinki
Glenn P. A. YapUniversity of Delaware
Mikko K. RitalaUniversity of Helsinki
Markku A. LeskeläUniversity of Helsinki
Simon D. ElliottTyndall National Institute, University College Cork
Sean T. BarryCarleton University

Films

Plasma Cu

Hardware used: Beneq TFS-200
1,3-diisopropyl-imidazolin-2-ylidene copper hexamethyldisilazide
CAS#: 0-0-0
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature Range N/A

Plasma Cu

Hardware used: Beneq TFS-200
4,5-dimethyl-1,3-diisopropyl-imidazol-2-ylidene copper hexamethyldisilazide
CAS#: 0-0-0
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic: Precursor Characterization
Analysis: TGA, Thermo Gravimetric Analysis
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: -

Characteristic: Thickness
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: -

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker-AXS APEX CCD diffractometer

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: -

Substrates

Si(100)

Notes

Considerable physical data of the precursors are presented.
The 4,5-dimethyl... precursor did not deposit Cu at the conditions considered while the other precursor did.
Gases purified with an Aeronex GateKeeper and Entegris GateKeeper purifiers.
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