Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Eric R. Sirianni Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Eric R. Sirianni returned 1 record(s).

NumberTitle
1Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor