Simon D. Elliott Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Simon D. Elliott returned 4 record(s).

Number	Title
1	Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
2	Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
3	Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook
4	First principles mechanistic study of self-limiting oxidative adsorption of remote oxygen plasma during the atomic layer deposition of alumina