Markku A. Leskelä Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Markku A. Leskelä returned 14 record(s).

Number	Title
1	Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
2	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
3	Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
4	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
5	Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
6	Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
7	Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
8	Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
9	Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings
10	Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
11	MANOS performance dependence on ALD Al2O3 oxidation source
12	Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
13	Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
14	Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films