Markku A. Leskelä Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Markku A. Leskelä returned 14 record(s).

Number	Title
1	Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
2	Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
3	Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
4	Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
5	MANOS performance dependence on ALD Al₂O₃ oxidation source
6	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
7	Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
8	Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
9	Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings
10	Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
11	Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
12	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
13	Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
14	Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor