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Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars

Type:
Journal
Info:
19 December 2011 / Vol. 19, No. 27 / OPTICS EXPRESS
Date:
2011-11-19
DOI:
http://dx.doi.org/10.1364/OE.19.026056

Author Information

Name Institution
Joshua D. CaldwellU.S. Naval Research Laboratory
Orest J. GlembockiU.S. Naval Research Laboratory
Francisco J. BezaresU.S. Naval Research Laboratory
Maarit I. KariniemiUniversity of Helsinki
Jaakko T. NiinistöUniversity of Helsinki
Timo T. HatanpääUniversity of Helsinki
Ronald W. RendellU.S. Naval Research Laboratory
Maraizu UkaegbuHoward University
Mikko K. RitalaUniversity of Helsinki
Sharka M. ProkesU.S. Naval Research Laboratory
Charles M. HostenHoward University
Markku A. LeskeläUniversity of Helsinki
Richard KasicaCNST-NIST

Films

Plasma Ag

Hardware used: Beneq TFS-200
Ag(FOD)(PEt3), Triethylphosphine (6,6,7,7,8,8,8- heptafluoro-2,2- dimethyl-3,5- octanedionate) silver(I)
CAS#: 165461-74-5
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: -

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Characteristic: SERS
Analysis: SERS, Surface Enhanced Raman Scattering
Diagnostic: DeltaNu ExamineR μ-Raman

Substrates

Silicon

Notes

Beneq TFS-200 Ag PEALD on Si nanopillar templates to achieve large-area, periodic "hot-spot" arrays.
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