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Maarit I. Kariniemi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Maarit I. Kariniemi returned 3 record(s).

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
2Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
3Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars